公开(公告)号：US20200217647A1

公开(公告)日：2020-07-09

申请号：US16647501

申请日：2018-09-19

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Munenori TAKUMI ,  Haruyoshi TOYODA ,  Yoshinori MATSUI ,  Kazutaka SUZUKI ,  Kazuhiro NAKAMURA ,  Keisuke UCHIDA

IPC: G01B11/24 ,  G01J1/02

Abstract: Provided is a shape measurement sensor including a light-receiving unit and a calculation unit. The light-receiving unit includes a plurality of pixel pairs. Each of the pixel pairs includes a first pixel and a second pixel that is disposed side by side with the first pixel along a first direction. In the first pixel, as an incident position is closer to one end of the light-receiving unit in a second direction, an intensity of a first electric signals decreases. In the second pixel, as the incident position is closer to the one end, an intensity of a second electric signal increases. The calculation unit calculates the incident position in the second direction for each of the pixel pairs on the basis of the intensity of the first electric signal and the intensity of the acquired second electric signal.