公开(公告)号：US20160291053A1

公开(公告)日：2016-10-06

申请号：US15086560

申请日：2016-03-31

Applicant: Hitachi High-Tech Science Corporation

Inventor： Masatsugu Shigeno ,  Yoshiteru Shikakura

IPC: G01Q30/06

CPC classification number: G01Q30/06

Abstract: A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed. MW=(Smax−Smin)  Equation (1) OV=(MW/2)+Smin  Equation (2)

公开(公告)号：US09354248B2

公开(公告)日：2016-05-31

申请号：US14673372

申请日：2015-03-30

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masatsugu Shigeno ,  Yoshiteru Shikakura

IPC: G01Q20/00 ,  G01Q10/00 ,  G01H1/00

CPC classification number: G01Q10/00 ,  G01H1/00 ,  G01Q40/00

Abstract: A method for measuring vibration characteristic of a cantilever is proposed in this disclosure. The method includes: measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever; obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and calculating a Q value by using the following Expression: Q value=f1×Th.

Abstract translation: 本公开提出了一种用于测量悬臂的振动特性的方法。 该方法包括：当将谐振频率为f1（Hz）的振动施加到悬臂时，测量安装在扫描探针显微镜中的悬臂的振幅V; 当振动幅度V等于或大于稳定振幅V0的0.90时获得时间Th（秒）; 并使用以下表达式计算Q值：Q value = f1×Th。