摘要:
A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a stationary contact point spaced apart from the vibrating body along a vibration direction of the vibrating body. When a direct current voltage with a predetermined magnitude is applied to the stationary contact point, a vibration margin of the vibrating body is increased, the vibrating body contacts the stationary contact point and the vibration type MEMS switch is turned on. A first substrate is bonded to a second substrate to isolate the vibrating body in a sealed vacuum space. The vibration type MEMS switch is turned on and/off by a resonance.
摘要:
A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.
摘要:
An actuator and a two dimensional scanner. The actuator and the two dimensional scanner include a base plate, a movable plate pivoted around at least one of a first imaginary axis or a second imaginary axis which are perpendicular to each other, a magnetic field-producing portion forming a magnetic force which acts in a direction parallel to the second axis and has a minimum size at a position of the first axis, a support member disposed coaxially with at least one of the first axis and the second axis, connecting the base plate and the movable plate, and forming a pivoting axis of the movable plate, and a driving coil portion to which a driving power of the movable plate is applied and disposed on the movable plate so as to have a point symmetry shape with respect to an intersecting point of the first axis and the second axis.
摘要:
A driving system is provided. The driving system includes a fixed substrate, a coil unit which generates an electromagnetic force if an electric current applied, a magnet unit formed on the fixed substrate to face the coil unit, and a plurality of driving units which are interconnected with each other on the fixed substrate, and which are moved respectively in parallel direction with respect to a surface of the fixed substrate in accordance with an interaction between the electromagnetic force and a magnetic force of the magnet unit, if the electric current is applied. As a result, a non-contact driving is provided.
摘要:
A charging device and an electrophotographic image forming apparatus including the same. A charging electrode of the charging device includes a porous insulating layer including a plurality of hollow rods vertically formed on a substrate formed of a conductive material, and a conductive nano structure formed in the hollow rods of the porous insulating layer. A grid electrode is supported by a spacer and is separated from the nano structure of the charging electrode. Furthermore, the charging electrode of the charging device may include a plurality of protrusions formed on a substrate, a porous insulating layer formed on the plurality of protrusions, and a conductive nano structure formed in hollow rods of the porous insulating layer.
摘要:
A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.
摘要:
A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.
摘要:
A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.
摘要:
A MEMS (Micro Electro Mechanical Systems) switch actuated by electrostatic and piezoelectric forces, includes a substrate; a first contact point positioned in a predetermined first area on an upper surface of the substrate; a support layer suspended at a predetermined distance from the upper surface of the substrate; a second contact point formed on a lower surface of the support layer; a first actuator operative to move the support layer in a predetermined direction using an electrostatic force; and a second actuator operative to move the support layer in a predetermined direction using a piezoelectric force. The first actuator is used to turn on the MEMS switch. The second actuator can be used together with the first actuator to turn on the MEMS switch or can be separately used to turn off the MEMS switch. As a result, a stiction can be prevented from occurring between contact points.
摘要:
A single-stage microactuator is provided. The single-stage microactuator includes: a substrate; a fixed plate electrode disposed at a central portion of the substrate; a rectangular stage having first and second side directions, which is located above the fixed plate electrode, the second direction being perpendicular to the first direction; a plurality of actuating frame parts provided corresponding to the two first direction of sides and the two second direction of sides for regions surrounding the stage, wherein each actuating frame includes a plurality of actuating frames arranged parallel to a corresponding side of the stage adjacent to each surrounding region; a plurality of comb normal directional deformable spring parts, each disposed between each side of the stage and the inner part of each actuating frame part, wherein each comb normal directional deformable spring part includes a plurality of spring members extending in a direction perpendicular to a corresponding side of the stage; a plurality of fixed frame parts, each including a plurality of fixed frames alternately arranged parallel to the plurality of actuating frames of a corresponding actuating frame part of each surrounding region; an actuating comb electrode provided in each actuating frame of the actuating frame part, the actuating comb electrode extending in a direction perpendicular to the side of the stage corresponding to each surrounding region; a fixed comb electrode arranged alternately in parallel to the actuating comb electrode in each fixed frame of the fixed frame part; and a plurality of comb directional deformable spring parts disposed on one side of each actuating frame part opposite the stage and the opposing side thereof for providing an elastic recovery force in a direction perpendicular to one side of the stage corresponding to each of the surrounding regions. The microactuator is capable of multi-dimensional actuation using a single electrode in an actuating part and of simplifying a fabrication process without an isolation process step.