Vibration type MEMS switch and fabricating method thereof
    11.
    发明授权
    Vibration type MEMS switch and fabricating method thereof 有权
    振动型MEMS开关及其制造方法

    公开(公告)号:US07528689B2

    公开(公告)日:2009-05-05

    申请号:US11182775

    申请日:2005-07-18

    IPC分类号: H01P1/10 H01H57/00

    摘要: A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a stationary contact point spaced apart from the vibrating body along a vibration direction of the vibrating body. When a direct current voltage with a predetermined magnitude is applied to the stationary contact point, a vibration margin of the vibrating body is increased, the vibrating body contacts the stationary contact point and the vibration type MEMS switch is turned on. A first substrate is bonded to a second substrate to isolate the vibrating body in a sealed vacuum space. The vibration type MEMS switch is turned on and/off by a resonance.

    摘要翻译: 振动型MEMS开关和制造振动型MEMS开关的方法。 振动型MEMS开关包括:被提供有预定频率的交流电压的振动体以预定方向振动; 以及沿着振动体的振动方向与振动体间隔开的固定接触点。 当具有预定大小的直流电压被施加到固定触点时,振动体的振动边界增大,振动体接触固定触点,振动型MEMS开关导通。 将第一基板接合到第二基板,以在密封的真空空间中隔离振动体。 振动型MEMS开关由共振接通和断开。

    MEMS switch and manufacturing method thereof
    12.
    发明授权
    MEMS switch and manufacturing method thereof 有权
    MEMS开关及其制造方法

    公开(公告)号:US07446634B2

    公开(公告)日:2008-11-04

    申请号:US11429364

    申请日:2006-05-08

    IPC分类号: H01H51/22

    CPC分类号: H01H59/0009 H01H2059/0054

    摘要: A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.

    摘要翻译: 一种MEMS开关,其包括形成在所述基板的顶部上的至少一个固定电极的基板和形成在所述基板的顶部上并形成在所述固定电极的侧表面上的至少一个恢复电极。 至少一个信号线形成在基板的顶部上并且具有开关接触部分。 可移动电极通过基板上的弹性连接器在预定空间处从基板的顶部远离连接,以及形成在可动电极的底表面上或弹性连接器的底表面上的至少一个接触件,用于附接到 或从开关接触部分拆卸。 至少一个枢转凸起形成在可动电极的底表面上或衬底的顶部上。

    Actuator and two-dimensional scanner
    13.
    发明申请
    Actuator and two-dimensional scanner 审中-公开
    执行器和二维扫描仪

    公开(公告)号:US20070268099A1

    公开(公告)日:2007-11-22

    申请号:US11654582

    申请日:2007-01-18

    IPC分类号: H01H51/22

    摘要: An actuator and a two dimensional scanner. The actuator and the two dimensional scanner include a base plate, a movable plate pivoted around at least one of a first imaginary axis or a second imaginary axis which are perpendicular to each other, a magnetic field-producing portion forming a magnetic force which acts in a direction parallel to the second axis and has a minimum size at a position of the first axis, a support member disposed coaxially with at least one of the first axis and the second axis, connecting the base plate and the movable plate, and forming a pivoting axis of the movable plate, and a driving coil portion to which a driving power of the movable plate is applied and disposed on the movable plate so as to have a point symmetry shape with respect to an intersecting point of the first axis and the second axis.

    摘要翻译: 执行器和二维扫描仪。 致动器和二维扫描仪包括基板,围绕彼此垂直的第一假想轴或第二假想轴中的至少一个枢转的可动板,形成磁力的磁场产生部分,其作用在 与第二轴平行的方向,在第一轴的位置具有最小尺寸,与第一轴和第二轴的至少一个同轴设置的支撑构件,连接基板和可动板,并形成 可移动板的枢转轴线和驱动线圈部分,可动板的驱动力被施加到可动板上,以便相对于第一轴线和第二轴线的交叉点具有点对称形状 轴。

    Driving system and hand tremor compensating apparatus adopting the same
    14.
    发明授权
    Driving system and hand tremor compensating apparatus adopting the same 有权
    采用相同的驱动系统和手震补偿装置

    公开(公告)号:US08218956B2

    公开(公告)日:2012-07-10

    申请号:US12107101

    申请日:2008-04-22

    IPC分类号: G03B17/00 G03B7/04 H04N5/228

    摘要: A driving system is provided. The driving system includes a fixed substrate, a coil unit which generates an electromagnetic force if an electric current applied, a magnet unit formed on the fixed substrate to face the coil unit, and a plurality of driving units which are interconnected with each other on the fixed substrate, and which are moved respectively in parallel direction with respect to a surface of the fixed substrate in accordance with an interaction between the electromagnetic force and a magnetic force of the magnet unit, if the electric current is applied. As a result, a non-contact driving is provided.

    摘要翻译: 提供驾驶系统。 驱动系统包括:固定基板,如果施加电流时产生电磁力的线圈单元,形成在固定基板上面对线圈单元的磁体单元,以及在该固定基板上彼此互连的多个驱动单元 固定基板,并且如果施加电流,则它们根据电磁力与磁体单元的磁力之间的相互作用分别相对于固定基板的表面在平行方向上移动。 结果,提供非接触驱动。

    CHARGING DEVICE AND ELECTROPHOTOGRAPHIC IMAGE FORMING APPARATUS INCLUDING THE SAME
    15.
    发明申请
    CHARGING DEVICE AND ELECTROPHOTOGRAPHIC IMAGE FORMING APPARATUS INCLUDING THE SAME 审中-公开
    充电装置和电子图像形成装置,包括它们

    公开(公告)号:US20110058852A1

    公开(公告)日:2011-03-10

    申请号:US12876385

    申请日:2010-09-07

    IPC分类号: G03G15/02

    摘要: A charging device and an electrophotographic image forming apparatus including the same. A charging electrode of the charging device includes a porous insulating layer including a plurality of hollow rods vertically formed on a substrate formed of a conductive material, and a conductive nano structure formed in the hollow rods of the porous insulating layer. A grid electrode is supported by a spacer and is separated from the nano structure of the charging electrode. Furthermore, the charging electrode of the charging device may include a plurality of protrusions formed on a substrate, a porous insulating layer formed on the plurality of protrusions, and a conductive nano structure formed in hollow rods of the porous insulating layer.

    摘要翻译: 一种充电装置和包括该充电装置的电子照相成像装置。 充电装置的充电电极包括多孔绝缘层,多孔绝缘层包括垂直形成在由导电材料形成的基板上的多个中空棒,以及形成在多孔绝缘层的中空棒中的导电纳米结构。 栅极由间隔物支撑并与充电电极的纳米结构分离。 此外,充电装置的充电电极可以包括形成在基板上的多个突起,形成在多个突起上的多孔绝缘层,以及形成在多孔绝缘层的中空棒中的导电纳米结构。

    Electromagnetic micro actuator and method of manufacturing the same
    16.
    发明授权
    Electromagnetic micro actuator and method of manufacturing the same 失效
    电磁微型致动器及其制造方法

    公开(公告)号:US07616365B2

    公开(公告)日:2009-11-10

    申请号:US11710432

    申请日:2007-02-26

    IPC分类号: G02B26/10 B81B3/00 B81B1/00

    CPC分类号: G02B26/085 G02B26/101

    摘要: A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.

    摘要翻译: 微型致动器和微型致动器的制造方法。 微型致动器包括基架,第一可移动部件,第二可动部件,至少一对永磁体,线圈部件和变形抑制部分。 第一可移动部分可旋转地连接到基架。 第二可移动部分可旋转地连接到第一可移动部分并且包括改变光路的反射镜。 线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。 变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。 变形抑制部抑制向线圈部施加电流时发生的热变形,以减少第一和第二可动部的变形。

    Vertical comb actuator radio frequency micro-electro-mechanical system switch
    17.
    发明授权
    Vertical comb actuator radio frequency micro-electro-mechanical system switch 有权
    立式梳子执行器射频微机电系统开关

    公开(公告)号:US07501911B2

    公开(公告)日:2009-03-10

    申请号:US11417242

    申请日:2006-05-04

    IPC分类号: H01P1/15

    CPC分类号: H01H59/0009

    摘要: A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.

    摘要翻译: 立式梳子致动器射频(RF)微机电系统(MEMS)开关。 RF MEMS开关包括基板; 第一和第二信号线以预定间隔彼此间隔开并沉积在基板的上表面上; 当从所述基板的上表面观察并且以与所述第一信号线和所述第二信号线预定的间隔隔开时,致动器定位在所述第一和第二信号线上方; 以及当从基板的上表面观察时定位在致动器上方的固定部分,其中当施加预定的驱动电压时,固定部分允许致动器与第一和第二信号线接触。 因此,可以防止致动器粘附到基板。 此外,RF MEMS开关可以在低电压和插入损耗下工作,并且可以降低功率损耗。

    Electromagnetic micro actuator and method of manufacturing the same
    18.
    发明申请
    Electromagnetic micro actuator and method of manufacturing the same 失效
    电磁微型致动器及其制造方法

    公开(公告)号:US20080054732A1

    公开(公告)日:2008-03-06

    申请号:US11710432

    申请日:2007-02-26

    IPC分类号: H02K33/00 G02B26/08

    CPC分类号: G02B26/085 G02B26/101

    摘要: A micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror which changes an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation, which occurs when a current is applied to the coil part, so as to reduce deformations of the first and second movable parts.

    摘要翻译: 微型致动器和微型致动器的制造方法。 微型致动器包括基架,第一可移动部件,第二可动部件,至少一对永磁体,线圈部件和变形抑制部分。 第一可移动部分可旋转地连接到基架。 第二可移动部分可旋转地连接到第一可移动部分并且包括改变光路的反射镜。 线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。 变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。 变形抑制部抑制向线圈部施加电流时发生的热变形,以减少第一和第二可动部的变形。

    MEMS switch actuated by the electrostatic force and piezoelectric force
    19.
    发明申请
    MEMS switch actuated by the electrostatic force and piezoelectric force 审中-公开
    MEMS开关由静电力和压电力驱动

    公开(公告)号:US20070024403A1

    公开(公告)日:2007-02-01

    申请号:US11439144

    申请日:2006-05-24

    IPC分类号: H01H51/22

    CPC分类号: H01H59/0009 H01H2057/006

    摘要: A MEMS (Micro Electro Mechanical Systems) switch actuated by electrostatic and piezoelectric forces, includes a substrate; a first contact point positioned in a predetermined first area on an upper surface of the substrate; a support layer suspended at a predetermined distance from the upper surface of the substrate; a second contact point formed on a lower surface of the support layer; a first actuator operative to move the support layer in a predetermined direction using an electrostatic force; and a second actuator operative to move the support layer in a predetermined direction using a piezoelectric force. The first actuator is used to turn on the MEMS switch. The second actuator can be used together with the first actuator to turn on the MEMS switch or can be separately used to turn off the MEMS switch. As a result, a stiction can be prevented from occurring between contact points.

    摘要翻译: 由静电和压电力驱动的MEMS(微机电系统)开关包括基板; 位于所述基板的上表面上的预定第一区域中的第一接触点; 从衬底的上表面预定距离悬挂的支撑层; 形成在所述支撑层的下表面上的第二接触点; 第一致动器,用于使用静电力使支撑层沿预定方向移动; 以及第二致动器,其用于使用压电力使支撑层沿预定方向移动。 第一个致动器用于打开MEMS开关。 第二致动器可以与第一致动器一起使用以打开MEMS开关,或者可以单独使用来关闭MEMS开关。 结果,可以防止在接触点之间发生静电。

    Single stage microactuator for multi-dimensional actuation

    公开(公告)号:US06445107B1

    公开(公告)日:2002-09-03

    申请号:US09682085

    申请日:2001-07-18

    IPC分类号: H02N100

    摘要: A single-stage microactuator is provided. The single-stage microactuator includes: a substrate; a fixed plate electrode disposed at a central portion of the substrate; a rectangular stage having first and second side directions, which is located above the fixed plate electrode, the second direction being perpendicular to the first direction; a plurality of actuating frame parts provided corresponding to the two first direction of sides and the two second direction of sides for regions surrounding the stage, wherein each actuating frame includes a plurality of actuating frames arranged parallel to a corresponding side of the stage adjacent to each surrounding region; a plurality of comb normal directional deformable spring parts, each disposed between each side of the stage and the inner part of each actuating frame part, wherein each comb normal directional deformable spring part includes a plurality of spring members extending in a direction perpendicular to a corresponding side of the stage; a plurality of fixed frame parts, each including a plurality of fixed frames alternately arranged parallel to the plurality of actuating frames of a corresponding actuating frame part of each surrounding region; an actuating comb electrode provided in each actuating frame of the actuating frame part, the actuating comb electrode extending in a direction perpendicular to the side of the stage corresponding to each surrounding region; a fixed comb electrode arranged alternately in parallel to the actuating comb electrode in each fixed frame of the fixed frame part; and a plurality of comb directional deformable spring parts disposed on one side of each actuating frame part opposite the stage and the opposing side thereof for providing an elastic recovery force in a direction perpendicular to one side of the stage corresponding to each of the surrounding regions. The microactuator is capable of multi-dimensional actuation using a single electrode in an actuating part and of simplifying a fabrication process without an isolation process step.