公开(公告)号：US08354902B2

公开(公告)日：2013-01-15

申请号：US12712971

申请日：2010-02-25

Applicant: Yasuhiro Kawabata ,  Yusuke Yamaji ,  Hiroyuki Tanaka ,  Tomomi Serikawa ,  Tatsuo Shinoura

Inventor： Yasuhiro Kawabata ,  Yusuke Yamaji ,  Hiroyuki Tanaka ,  Tomomi Serikawa ,  Tatsuo Shinoura

IPC: H01H51/22

CPC classification number: H01H1/0036 ,  B81B3/0037 ,  G02B26/0841 ,  H01H51/2209 ,  H01H59/0009 ,  H01H2059/0054

Abstract: A structure of a spring has a supporting member, an actuating member that is rotatably supported to the supporting member by a first supporting axis at a portion near a center, and a plurality of interlocking members that are each provided on both sides of the first supporting axis, that are rotatably supported to the supporting member by a second supporting axis, and that are rotatably coupled to the actuating member. Each point of action of the interlocking members is defined at a portion that is closer to the first supporting axis than to the coupled portion of the second supporting axis and the actuating member.

Abstract translation: 弹簧的结构具有支撑构件，致动构件通过第一支撑轴线在靠近中心的部分处可旋转地支撑在支撑构件上，并且多个互锁构件分别设置在第一支撑件的两侧 轴线，其通过第二支撑轴线可旋转地支撑到支撑构件，并且可旋转地联接到致动构件。 互锁构件的每个作用点被限定在比第二支撑轴线和致动构件的联接部分更靠近第一支撑轴线的部分。

公开(公告)号：US08089131B2

公开(公告)日：2012-01-03

申请号：US12502500

申请日：2009-07-14

Applicant: Hiroaki Yamazaki

Inventor： Hiroaki Yamazaki

IPC: H01L27/14 ,  H01L29/82 ,  H01L29/84 ,  H01L23/02

CPC classification number: H01H59/0009 ,  B81B3/0086 ,  B81B7/007 ,  B81B2201/016 ,  B81B2201/0264 ,  B81B2207/098 ,  H01H2059/0054

Abstract: A micro movable device includes a protection cap for protecting a movable unit arranged above a semiconductor substrate and the movable unit, signal line for transmitting a high-frequency signal formed above the semiconductor substrate, and insulation layer that has projection formed to project upward from the semiconductor substrate and coated surfaces with the signal line.

Abstract translation: 微型可移动装置包括用于保护布置在半导体衬底上方的可移动单元的保护盖和用于传输形成在半导体衬底上方的高频信号的可移动单元，信号线，以及具有突起的绝缘层，所述突起形成为从 半导体衬底和涂有表面的信号线。

公开(公告)号：US20100295639A1

公开(公告)日：2010-11-25

申请号：US12712971

申请日：2010-02-25

Applicant: Yasuhiro Kawabata ,  Yusuke Yamaji ,  Hiroyuki Tanaka ,  Tomomi Serikawa ,  Tatsuo Shinoura

Inventor： Yasuhiro Kawabata ,  Yusuke Yamaji ,  Hiroyuki Tanaka ,  Tomomi Serikawa ,  Tatsuo Shinoura

IPC: H01H50/54 ,  F16F1/18

CPC classification number: H01H1/0036 ,  B81B3/0037 ,  G02B26/0841 ,  H01H51/2209 ,  H01H59/0009 ,  H01H2059/0054

Abstract: A structure of a spring has a supporting member, an actuating member that is rotatably supported to the supporting member by a first supporting axis at a portion near a center, and a plurality of interlocking members that are each provided on both sides of the first supporting axis, that are rotatably supported to the supporting member by a second supporting axis, and that are rotatably coupled to the actuating member. Each point of action of the interlocking members is defined at a portion that is closer to the first supporting axis than to the coupled portion of the second supporting axis and the actuating member.

Abstract translation: 弹簧的结构具有支撑构件，致动构件通过第一支撑轴线在靠近中心的部分处可旋转地支撑在支撑构件上，并且多个互锁构件分别设置在第一支撑件的两侧 轴线，其通过第二支撑轴线可旋转地支撑到支撑构件，并且可旋转地联接到致动构件。 互锁构件的每个作用点被限定在比第二支撑轴线和致动构件的联接部分更靠近第一支撑轴线的部分。

公开(公告)号：US20100237738A1

公开(公告)日：2010-09-23

申请号：US12405758

申请日：2009-03-17

Applicant: CHARLES GORDON SMITH ,  RICHARD L. KNIPE

Inventor： CHARLES GORDON SMITH ,  RICHARD L. KNIPE

IPC: H02N1/00

CPC classification number: H01H59/0009 ,  G11C23/00 ,  H01H1/0036 ,  H01H2001/0047 ,  H01H2059/0036 ,  H01H2059/0054 ,  H01H2059/0063

Abstract: Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes.

Abstract translation: 本文公开的实施例通过使用一系列将开关牢固地粘附到着陆电极到仅弱附着点的力的脉冲来解决开关器件中的静电问题。 一旦处于低附着状态，则可以用由开关的弹簧常数提供的较小的力和/或施加到附近电极的低电压产生的静电力将开关拉离开接触。

公开(公告)号：US07750419B2

公开(公告)日：2010-07-06

申请号：US12158652

申请日：2006-12-18

Applicant: Achim Hilgers

Inventor： Achim Hilgers

IPC: H01L29/96

CPC classification number: H01G5/38 ,  H01G5/18 ,  H01H2057/006 ,  H01H2059/0054

Abstract: An RF MEMS tuneable arrangement, e.g. variable capacitor, having two or more tunable devices, e.g. variable capacitances, a coupling circuit arranged to couple the tunable devices together to provide a combined output, e.g. a combined capacitance, that is variable according to a tuning signal. The coupling circuit is reconfigurable to alter a response of the arrangement to changes in the tuning signal, to enable a broader range of applications, manufacturing cost reductions and more flexibility in design. The device can have a pivoted beam (30), actuable by a control signal, the beam having electrodes (40, 60) at either side of the pivot, and corresponding fixed electrodes (50, 70) facing the electrodes on the beam to provide a two or more variable devices such as switches or variable capacitors, arranged such that a given movement of the beam causes electrode separation in the same direction for the two or more switches or capacitors.

Abstract translation: RF MEMS可调谐布置，例如 可变电容器，具有两个或多个可调谐器件，例如。 可变电容，耦合电路，其布置成将可调谐器件耦合在一起以提供组合输出，例如， 组合电容，根据调谐信号可变。 耦合电路是可重新配置的，以改变布置对调谐信号变化的响应，从而能够实现更广泛的应用范围，降低制造成本并提高设计灵活性。 该装置可以具有可由控制信号致动的枢转梁（30），该梁在枢轴的任一侧具有电极（40,60），以及对应于梁上的电极的固定电极（50,70），以提供 两个或更多个可变装置，例如开关或可变电容器，被布置成使得所述光束的给定移动使两个或更多个开关或电容器在相同方向上的电极分离。

公开(公告)号：US20060131150A1

公开(公告)日：2006-06-22

申请号：US11296341

申请日：2005-12-08

Applicant: Takashi Yuba ,  Hideki Iwata ,  Yuriko Segawa

Inventor： Takashi Yuba ,  Hideki Iwata ,  Yuriko Segawa

IPC: H01H13/00

CPC classification number: H01H50/005 ,  H01H59/0009 ,  H01H2001/0063 ,  H01H2059/0054 ,  H01H2059/0072

Abstract: A switch device includes: a movable spring that has one end as a fixed end, and the other end as a free end; a substrate that is disposed below the movable spring; a first contact point that is disposed at a predetermined location between the fixed end and the free end of the movable spring; a protrusion that is formed on the substrate and is located to face the free end of the movable spring; and a second contact point that is provided on the substrate and is located to face the first contact point. This switch device is put into an ON state when the free end of the movable spring is brought into contact with the protrusion and the first contact point is brought into contact with the second contact point.

公开(公告)号：US20060131147A1

公开(公告)日：2006-06-22

申请号：US11251804

申请日：2005-10-18

Applicant: Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

Inventor： Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

IPC: H01H57/00 ,  H02N1/00

CPC classification number: H01H59/0009 ,  H01H2059/0054

Abstract: A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points.

公开(公告)号：US20030006868A1

公开(公告)日：2003-01-09

申请号：US10211058

申请日：2002-08-02

Inventor： Robert Aigner ,  Sven Michaelis ,  Florian Plotz

IPC: H01H051/22

CPC classification number: H01H59/0009 ,  H01H1/20 ,  H01H2059/0054

Abstract: A microrelay has a switching part which is pivotably suspended on a substrate and can be moved into two alternative switching states like a rocker, by electrostatic attraction through the use of suitably attached electrodes. The switching function is brought about by electrodes which are fastened to the substrate above the rocker being shorted by metallizations or contact electrodes on an upper side of the switching part.

Abstract translation: 微型继电器具有可旋转地悬挂在基板上的切换部件，并且可以通过使用适当连接的电极通过静电吸引而被移动到两个替代的切换状态，如摇杆。 切换功能是通过固定在摇杆上方的基板上的电极产生的，该电极被切换部分的上侧上的金属化或接触电极短路。

公开(公告)号：US07629194B1

公开(公告)日：2009-12-08

申请号：US11845602

申请日：2007-08-27

Applicant: James H. Schaffner ,  Tsung-Yuan Hsu ,  Adele E. Schmitz ,  Hui-Pin Hsu

Inventor： James H. Schaffner ,  Tsung-Yuan Hsu ,  Adele E. Schmitz ,  Hui-Pin Hsu

IPC: H01L21/00

CPC classification number: H01H59/0009 ,  H01H2001/0047 ,  H01H2059/0054

Abstract: Apparatus for a micro-electro-mechanical switch that provides single pole, double throw switching action. The switch has two input lines and two output lines. The switch has a seesaw cantilever arm with contacts at each end that electrically connect the input lines with the output lines. The cantilever arm is latched into position by frictional forces between structures on the cantilever arm and structures on the substrate in which the cantilever arm is disposed. The state of the switch is changed by applying an electrostatic force at one end of the cantilever arm to overcome the mechanical force holding the other end of the cantilever arm in place.

Abstract translation: 用于微机电开关的装置，其提供单极双掷切换动作。 开关有两条输入线和两条输出线。 开关具有跷跷板悬臂，每端具有触点，将输入线与输出线电连接。 悬臂由于悬臂上的结构与设置有悬臂的基板上的结构之间的摩擦力而被锁定到位。 通过在悬臂的一端施加静电力来克服将悬臂的另一端保持就位的机械力来改变开关的状态。

公开(公告)号：US07501920B2

公开(公告)日：2009-03-10

申请号：US11296341

申请日：2005-12-08

Applicant: Takashi Yuba ,  Hideki Iwata ,  Yuriko Segawa

Inventor： Takashi Yuba ,  Hideki Iwata ,  Yuriko Segawa

IPC: H01H51/22

CPC classification number: H01H50/005 ,  H01H59/0009 ,  H01H2001/0063 ,  H01H2059/0054 ,  H01H2059/0072

Abstract: A switch device includes: a movable spring that has one end as a fixed end, and the other end as a free end; a substrate that is disposed below the movable spring; a first contact point that is disposed at a predetermined location between the fixed end and the free end of the movable spring; a protrusion that is formed on the substrate and is located to face the free end of the movable spring; and a second contact point that is provided on the substrate and is located to face the first contact point. This switch device is put into an ON state when the free end of the movable spring is brought into contact with the protrusion and the first contact point is brought into contact with the second contact point.

Abstract translation: 开关装置包括：可动弹簧，其一端为固定端，另一端为自由端; 设置在所述可动弹簧下方的基板; 第一接触点，其设置在所述固定端和所述可动弹簧的自由端之间的预定位置处; 形成在所述基板上且位于与所述可动弹簧的自由端相对的突出部; 以及第二接触点，其设置在所述基板上并且被定位成面对所述第一接触点。 当可动弹簧的自由端与突起接触并且第一接触点与第二接触点接触时，该开关装置处于ON状态。