公开(公告)号：US20080110008A1

公开(公告)日：2008-05-15

申请号：US11873043

申请日：2007-10-16

申请人： Urs Walchli ,  Per Bjorkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wuest

发明人： Urs Walchli ,  Per Bjorkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wuest

IPC分类号： G01L7/08 ,  G01L19/08

CPC分类号： G01L9/0079 ,  Y10T29/49769 ,  Y10T29/49776

摘要： A manufacturing method for a vacuum measuring cell provides first and second Al2O3 ceramic or sapphire housing bodies on opposite sides of an Al2O3 ceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fibre outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.

摘要翻译： 用于真空测量池的制造方法在Al 2 O 2的相对侧上提供第一和第二Al 2 O 3 O 3陶瓷或蓝宝石壳体 陶瓷或蓝宝石膜在其相对的外围边缘处密封到主体。 参考真空室和测量真空室位于膜的相对侧。 光学透明窗设置在第一壳体中，并且光学反射材料设置在膜的中心区域上。 透镜在光学透明窗口上方，用于光学连接到膜上的光反射材料，并且在参考真空室外部并且在与光学透明窗口相距一定距离处的光纤馈送光通过透镜和窗口并进出到 膜上的光学反射材料，使得法布里 - 珀罗干涉仪检测膜偏转的水平。

公开(公告)号：US07305888B2

公开(公告)日：2007-12-11

申请号：US11497226

申请日：2006-08-01

申请人： Urs Wälchli ,  Per Björkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wüest

发明人： Urs Wälchli ,  Per Björkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wüest

IPC分类号： G01L9/12

CPC分类号： G01L9/0079 ,  Y10T29/49769 ,  Y10T29/49776

摘要： A vacuum measuring cell has a first housing body and a membrane, both of Al2O3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of Al2O3 ceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.

摘要翻译： 真空测量单元具有第一壳体和膜，Al 2 N 3 O 3陶瓷或蓝宝石两者。 膜是平面的，具有通过第一密封件连接到第一壳体的外围边缘以形成参考真空室。 与膜相对的Al 2 O 3 O 3陶瓷或蓝宝石的第二壳体通过第二密封件连接到膜的周边边缘，以形成测量真空室。 端口将真空测量单元连接到要测量的介质。 至少在第一壳体的中心区域中，形成光学透明窗口，并且至少膜的中心区域具有光学反射表面。 在参考真空室之外，与窗口相对并且距离窗口一定距离，布置光纤以将光输入和输出到膜的表面上。

公开(公告)号：US4794266A

公开(公告)日：1988-12-27

申请号：US10766

申请日：1987-02-04

申请人： Heikki Saari

发明人： Heikki Saari

IPC分类号： G01N21/15 ,  G01N21/53 ,  G01N21/59 ,  G01N15/06 ,  G01N15/07

CPC分类号： G01N21/538 ,  G01N21/15 ,  G01N21/59 ,  G01N2021/157

摘要： Measurement equipment based on the measurement of light transmission are plagued by changing characteristics of protective glass surfaces due to contamination or other factors. In a method, light transmission is measured by sending light from a transmitter (1) and recording the received light intensity at a receiver (2), after which the light intensity is obtained by computation means. Light from light sources (5, 6) travels into protective glasses (3, 4) of the transmitter and the receiver so that the light rays are subjected to total internal reflection within the glasses, after which the intensities of the totally reflected light rays are measured by a detector (7, 8), and the obtained intensity values are used for correcting the intensity attenuation, effected by the protective glasses and their contamination onto the path from the transmitter to the receiver. The apparatus comprises light sources (5, 6) integral with the transmitter (1) and the receiver (2), with the light rays from the light sources adapted to enter the protective glasses in such a manner as to be subjected to a total internal reflection, and detectors (7, 8) for intensity measurement of the totally reflected light rays.

摘要翻译： 基于光透射测量的测量设备由于污染或其他因素而改变了保护玻璃表面的特性。 在一种方法中，通过从发射器（1）发送光并在接收器（2）处记录接收到的光强度来测量光透射，之后通过计算装置获得光强度。 来自光源（5,6）的光行进到发射器和接收器的保护眼镜（3,4）中，使得光线在眼镜内受到全内反射，之后全反射光线的强度为 由检测器（7,8）测量，所获得的强度值用于校正由保护眼镜及其污染物从发射器到接收器的路径上的强度衰减。 该装置包括与发射器（1）和接收器（2）成一体的光源（5,6），其中来自光源的光线适于进入保护眼镜，以使其经受总内部 反射和检测器（7,8），用于全反射光线的强度测量。