公开(公告)号：US5856652A

公开(公告)日：1999-01-05

申请号：US804115

申请日：1997-02-20

申请人： Masanori Mayuzumi

发明人： Masanori Mayuzumi

IPC分类号： C23C16/46 ,  C23C16/48 ,  C30B25/10 ,  C30B31/12 ,  C30B35/00 ,  H01L21/203 ,  H01L21/205 ,  H01L21/26 ,  H01L21/324 ,  A21B1/00

CPC分类号： C30B25/105 ,  C23C16/481 ,  C30B31/12

摘要： In a radiant heating apparatus, at least an outer radiant heating unit and an inner radiant heating unit located inside the outer radiant heating unit are disposed. A peripheral portion of an article to be treated is mainly heated by the outer radiant heating unit, while a central portion of the article is mainly heated by the internal radiant heating unit. A partition wall is disposed between the outer and inner radiant heating units. Radiation light emitted by each radiant heating unit is reflected by the partition wall so that the radiation light is separated from that emitted by the other radiant heating unit, whereby an area is defined in which the article is heated by each radiant heating unit. Accordingly, a larger article, particularly a substrate-shaped article, can be heated uniformly.

摘要翻译： 在辐射加热装置中，设置有位于外辐射加热单元内的至少外辐射加热单元和内辐射加热单元。 被处理物的周边部分主要由外部辐射加热单元加热，而制品的中心部分主要由内部辐射加热单元加热。 分隔壁设置在外辐射加热单元和内辐射加热单元之间。 由每个辐射加热单元发射的辐射光被分隔壁反射，使得辐射光与由另一个辐射加热单元发射的辐射光分离，由此定义了由每个辐射加热单元加热物品的区域。 因此，可以均匀地加热较大的制品，特别是基底状制品。