公开(公告)号：US20220388908A1

公开(公告)日：2022-12-08

申请号：US17885147

申请日：2022-08-10

Applicant: IDEMITSU KOSAN CO., LTD.

Inventor： Kazuyoshi INOUE ,  Masatoshi SHIBATA ,  Emi KAWASHIMA ,  Yuki TSURUMA ,  Shigekazu TOMAI

IPC: C04B35/01 ,  C23C14/34 ,  H01L27/146 ,  H01L29/786

Abstract: A sintered oxide contains In element, Y element, and Ga element at respective atomic ratios as defined in formulae (1) to (3) below, 0.80≤In/(In+Y+Ga)≤0.96  (1), 0.02≤Y/(In+Y+Ga)≤0.10  (2), and 0.02≤Ga/(In+Y+Ga)≤0.10  (3), and Al element at an atomic ratio as defined in a formula (4) below, 0.005≤Al/(In+Y+Ga+Al)≤0.07  (4), where In, Y, Ga, and Al in the formulae represent the number of atoms of the In element, Y element, Ga element, and Al element in the sintered oxide, respectively.

公开(公告)号：US20220340442A1

公开(公告)日：2022-10-27

申请号：US17860678

申请日：2022-07-08

Applicant: IDEMITSU KOSAN CO., LTD.

Inventor： Kazuyoshi INOUE ,  Shigekazu TOMAI ,  Masatoshi SHIBATA

IPC: C01G15/00 ,  C04B35/50 ,  C23C14/34 ,  C04B35/01 ,  C04B35/44

Abstract: A garnet compound represented by a general formula (I): Ln3In2Ga3-XAlXO12 (I) (in the formula, Ln represents one or more metal elements selected from La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and X satisfies an expression 0≤X

公开(公告)号：US20210343876A1

公开(公告)日：2021-11-04

申请号：US17264650

申请日：2019-08-01

Applicant: IDEMITSU KOSAN CO.,LTD.

Inventor： Kazuyoshi INOUE ,  Masatoshi SHIBATA ,  Emi KAWASHIMA ,  Kenichi SASAKI ,  Atsushi YAO

IPC: H01L29/786 ,  C23C14/34 ,  C01G15/00

Abstract: A crystalline structure compound A is represented by a composition formula (2) and has having diffraction peaks respectively in below-defined ranges (A) to (K) of an incidence angle observed by X-ray diffraction measurement. (InxGayAlz)2O3  (2) In the formula (2), 0.47≤x≤0.53, 0.17≤y≤0.43, 0.07≤z≤0.33, and x+y+z=1.
31° to 34° (A), 36° to 39° (B), 30° to 32° (C), 51° to 53° (D), 53° to 56° (E), 62° to 66° (F), 9° to 11° (G), 19° to 21° (H), 42° to 45° (I), 8° to 10° (J), and 17° to 19° (K).

公开(公告)号：US20200052130A1

公开(公告)日：2020-02-13

申请号：US16482226

申请日：2018-01-31

Applicant: IDEMITSU KOSAN CO., LTD.

Inventor： Kazuyoshi INOUE ,  Masatoshi SHIBATA

IPC: H01L29/786 ,  C23C14/08 ,  H01L21/203 ,  H01L27/12 ,  C23C14/34

Abstract: A sintered oxide includes an In2O3 crystal, and a crystal A whose diffraction peak is in an incidence angle (2θ) range defined by (A) to (F) below as measured by X-ray (Cu—K α ray) diffraction measurement: 31.0 to 34.0 degrees . . . (A); 36.0 to 39.0 degrees . . . (B); 50.0 to 54.0 degrees . . . (C); 53.0 to 57.0 degrees . . . (D); 9.0 to 11.0 degrees . . . (E); and 19.0 to 21.0 degrees . . . (F).

公开(公告)号：US20190177176A1

公开(公告)日：2019-06-13

申请号：US16325170

申请日：2017-08-25

Applicant: IDEMITSU KOSAN CO., LTD.

Inventor： Kazuyoshi INOUE ,  Shigekazu TOMAI ,  Masatoshi SHIBATA

IPC: C01G15/00 ,  C04B35/50 ,  C23C14/34

Abstract: A garnet compound represented by a general formula (I): Ln3In2Ga3-XAlXO12 (I) (in the formula, Ln represents one or more metal elements selected from La, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and X satisfies an expression 0≤X