公开(公告)号：US20140130593A1

公开(公告)日：2014-05-15

申请号：US13849376

申请日：2013-03-22

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Jyun-Kai Ciou ,  Yan-Rung Lin ,  Chang-Ho Liou ,  Chang-Yi Chen

IPC: A61B5/103

CPC classification number: A61B5/1036 ,  A61B5/1038 ,  A61B2562/046 ,  A61B2562/166

Abstract: A pressure measurement structure includes a first substrate, a second substrate, a first electrode layer, a second electrode layer, at least a piezoresistive layer and a wiring layer. The second substrate faces towards the first substrate. The first electrode layer is disposed on the first substrate and faces towards the second substrate. The second electrode layer is disposed on the second substrate and faces towards the first electrode layer. At least a piezoresistive layer is located between the first electrode layer and the second electrode layer. A wiring layer is disposed on the second substrate and back to the first substrate. The wiring layer includes multiple wires. Part of the wires are electrically connected to the first electrode layer. The other part of the wires are electrically connected to the second electrode layer.

Abstract translation: 压力测量结构包括第一基板，第二基板，第一电极层，第二电极层，至少压阻层和布线层。 第二基板朝向第一基板。 第一电极层设置在第一基板上并朝向第二基板。 第二电极层设置在第二基板上并朝向第一电极层。 至少压电层位于第一电极层和第二电极层之间。 布线层设置在第二基板上并返回到第一基板。 布线层包括多根线。 电线的一部分电连接到第一电极层。 电线的另一部分电连接到第二电极层。