公开(公告)号：US20220128515A1

公开(公告)日：2022-04-28

申请号：US17647403

申请日：2022-01-07

Applicant: Infineon Technologies AG

Inventor： Johannes Manz ,  Wolfgang Klein ,  David Tumpold

IPC: G01N29/24 ,  G01N1/22

Abstract: A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.

公开(公告)号：US20180029878A1

公开(公告)日：2018-02-01

申请号：US15662389

申请日：2017-07-28

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Matthias Friedrich Herrmann ,  Johannes Manz

IPC: B81B7/00 ,  B81C1/00 ,  B81B3/00

CPC classification number: B81B7/0061 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2201/033 ,  B81B2203/0127 ,  B81B2203/04 ,  B81C1/00158 ,  B81C1/00166

Abstract: A microelectromechanical device, a microelectromechanical system, and a method of manufacturing a microelectromechanical device, wherein the microelectromechanical device may include: a substrate; a diaphragm mounted to the substrate; a first electrode mounted to the diaphragm; a second electrode mounted to the substrate; wherein the first electrode is laterally adjacent to the second electrode; and wherein the diaphragm is arranged over a gap between the first electrode and the second electrode.