公开(公告)号：US09983401B2

公开(公告)日：2018-05-29

申请号：US15156200

申请日：2016-05-16

Applicant: Intel Corporation

Inventor： Nicolas Abele ,  Faouzi Khechana ,  Julien Gamet

IPC: G02B26/08 ,  B81B3/00 ,  G02B26/10

CPC classification number: G02B26/0833 ,  B81B3/0072 ,  B81B2201/042 ,  B81B2203/0154 ,  B81B2203/0181 ,  B81B2203/06 ,  G02B26/085 ,  G02B26/101 ,  G02B26/105

Abstract: According to the present invention there is provided a MEMS device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.

公开(公告)号：US09921415B2

公开(公告)日：2018-03-20

申请号：US14692517

申请日：2015-04-21

Applicant: INTEL CORPORATION

Inventor： Lucio Kilcher ,  Nicolas Abele ,  Faouzi Khechana

IPC: G02B27/48 ,  G03B21/28 ,  G02B26/08 ,  B81C1/00 ,  G02B5/02 ,  G02B26/10 ,  H04N9/31

CPC classification number: G02B27/48 ,  B81C1/00 ,  G02B5/0215 ,  G02B5/0278 ,  G02B26/0833 ,  G02B26/0875 ,  G02B26/105 ,  G03B21/28 ,  H04N9/3129 ,  Y10T29/42

Abstract: Optical MEMS scanning micro-mirror comprising: —a movable scanning micro-mirror (101), being pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror, —a transparent window (202) substantially covering the reflection side of the micro-mirror; —wherein a piezo-actuator assembly (500) and a layer of deformable transparent material (501) are provided on the outer portion of said window (202); —the piezo-actuator assembly (500) being arranged at the periphery of the layer of transparent material (501); —said piezo-actuator assembly (500) and transparent material (501) cooperating so that when actuated, the piezo-actuator assembly (500) causes micro-deformation of the transparent material (501), thereby providing an anti-speckle effect. The invention also provides the corresponding micro-projection system and method for reducing speckle.