公开(公告)号：US20150318446A1

公开(公告)日：2015-11-05

申请号：US14265763

申请日：2014-04-30

Applicant: Intermolecular, Inc.

Inventor： Jianhua Hu ,  Heng Kai Hsu ,  Minh Huu Le ,  Sandeep Nijhawan ,  Teresa B. Sapirman

IPC: H01L33/42 ,  H01L33/46 ,  H01L33/00 ,  H01L33/32

CPC classification number: H01L33/42 ,  H01L33/005 ,  H01L33/32 ,  H01L33/405 ,  H01L33/46 ,  H01L2933/0016

Abstract: A ternary transparent conductive oxide, indium zinc oxide (IZO), is formed as a thin film by co-sputtering zinc oxide with indium oxide at a deposition temperature between 25 and 200 C. Optionally, up to 1-2% Al may be added by various methods. The layers may be annealed at temperatures between 200 and 400 C. Measurements of IZO with 75-85 wt % In2O3 showed low resistivity and low visible absorbance, both of which were thermally stable up to 400 C.

Abstract translation: 通过在25-200℃的沉积温度下用氧化铟共溅射氧化锌，形成三元透明导电氧化物铟锌氧化物（IZO）作为薄膜。可选地，可以添加至多1-2％的Al 通过各种方法。 这些层可以在200-400℃的温度下退火。具有75-85wt％In2O3的IZO的测量显示低电阻率和低可见吸光度，两者都高达400℃是热稳定的。

公开(公告)号：US20140261660A1

公开(公告)日：2014-09-18

申请号：US14082402

申请日：2013-11-18

Applicant: Intermolecular, Inc.

Inventor： Jianhua Hu ,  Heng-Kai Hsu ,  Minh Huu Le ,  Sandeep Nijhawan

IPC: H01L31/0224 ,  H01L31/18

CPC classification number: H01L31/022466 ,  H01L31/0747 ,  H01L31/1832 ,  H01L31/1884 ,  Y02E10/50

Abstract: Methods are used to develop and evaluate new materials and deposition processes for use as TCO materials in HJCS solar cells. The TCO layers allow improved control over the uniformity of the TCO conductivity and interface properties, and reduce the sensitivity to the texture of the wafer. In Some embodiments, the TCO materials include indium, zinc, tin, and aluminum.

Abstract translation: 方法用于开发和评估用于HJCS太阳能电池中的TCO材料的新材料和沉积工艺。 TCO层允许改进对TCO电导率和界面性质的均匀性的控制，并降低对晶片纹理的敏感性。 在一些实施方案中，TCO材料包括铟，锌，锡和铝。