公开(公告)号：US20110296913A1

公开(公告)日：2011-12-08

申请号：US13134024

申请日：2011-05-25

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

IPC: G01C19/56

CPC classification number: G01C19/5755

Abstract: A yaw rate sensor includes: at least one Coriolis element; a drive device connected to the Coriolis element and configured to drive a vibration of the Coriolis element; a detection device having at least one rotor; and a coupling device connected to the detection device and to the Coriolis element. The coupling device is configured to couple a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration, so that when the Coriolis element is deflected a torque for driving the at least one rotor is transmitted from the Coriolis element to the at least one rotor.

Abstract translation: 横摆率传感器包括：至少一个科里奥利元件; 连接到科里奥利元件并被配置为驱动科里奥利元件的振动的驱动装置; 具有至少一个转子的检测装置; 以及连接到检测装置和科里奥利元件的耦合装置。 联接装置被配置成将Coriolis元件的振动平面中的偏转与垂直于振动的方向耦合到检测装置，使得当科里奥利元件偏转时，用于驱动至少一个转子的转矩从 科里奥利元件至少一个转子。

公开(公告)号：US09277329B2

公开(公告)日：2016-03-01

申请号：US14470619

申请日：2014-08-27

Applicant: Christoph Schelling ,  Rolf Scheben ,  Ricardo Ehrenpfordt

Inventor： Christoph Schelling ,  Rolf Scheben ,  Ricardo Ehrenpfordt

IPC: H04R25/00 ,  H04R23/00 ,  H04R7/00 ,  H04R19/00 ,  H04R31/00 ,  H04R19/01

CPC classification number: H04R23/00 ,  H04R7/00 ,  H04R19/005 ,  H04R19/01 ,  H04R19/016 ,  H04R31/00 ,  H04R2201/003

Abstract: An implementation for an electret in a capacitive MEMS element including a pressure-sensitive diaphragm, which is produce-able using standard methods of semiconductor technology for easy integration into the manufacturing process of MEMS semiconductor elements. Such MEMS elements include at least one pressure-sensitive diaphragm including at least one deflectable diaphragm electrode of a capacitor system for signal detection and one fixed non-pressure-sensitive counter-element including at least one counter-electrode of this capacitor system, at least one electrode of the capacitor system being provided with an electrically charged electret, so that there is a potential difference between the two electrodes of the capacitor system. The electret includes at least two adjacent layers made from different dielectric materials, electrical charges being stored on their boundary surface.

Abstract translation: 用于在包括压敏隔膜的电容MEMS元件的驻极体，其是产生-能够利用半导体技术的标准方法方便地集成到MEMS的半导体元件的制造工艺的实现。 这种MEMS元件包括至少一个压敏膜片包括用于信号检测的电容器系统的至少一个可偏转隔膜电极和一个固定的非压敏计数元件包括该电容器系统的至少一个反电极，至少 电容器系统的一个电极设置有带电荷的驻极体，使得电容器系统的两个电极之间存在电位差。 驻极体包括由不同介电材料制成的至少两个相邻层，电荷存储在其边界表面上。