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    MEMS device mechanical amplitude control
    3.
    发明授权
    MEMS device mechanical amplitude control 有权

    公开(公告)号：US09903718B2

    公开(公告)日：2018-02-27

    申请号：US14723676

    申请日：2015-05-28

    申请人： InvenSense, Inc.

    发明人： Matthew J. Thompson ,  Ilya Gurin

    IPC分类号： G01C19/5762 ,  G01C19/5755 ,  B81B3/00

    CPC分类号： G01C19/5755 ,  B81B3/0018 ,  B81B2201/02

    摘要： A system and/or method for utilizing mechanical motion limiters to control proof mass amplitude in MEMS devices (e.g., MEMS devices having resonant MEMS structures, for example various implementations of gyroscopes, magnetometers, accelerometers, etc.). As a non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished during normal (e.g., steady state) gyroscope operation utilizing impact stops (e.g., bump stops) of various designs. As another non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished utilizing non-impact limiters (e.g., springs) of various designs, for example springs exhibiting non-linear stiffness characteristics through at least a portion of their normal range of operation.

    VIBRATING-MASS GYROSCOPE SYSTEMS AND METHOD
    4.
    发明申请
    VIBRATING-MASS GYROSCOPE SYSTEMS AND METHOD 审中-公开

    公开(公告)号：US20180031373A1

    公开(公告)日：2018-02-01

    申请号：US15717544

    申请日：2017-09-27

    申请人： ALEXANDER TRUSOV ,  DAVID M. ROZELLE

    发明人： ALEXANDER TRUSOV ,  DAVID M. ROZELLE

    IPC分类号： G01C19/5726 ,  G01C19/5755 ,  G01C19/574 ,  G01C25/00

    CPC分类号： G01C19/5726 ,  G01C19/574 ,  G01C19/5755 ,  G01C25/00 ,  G01C25/005

    摘要： One embodiment of the invention includes a vibrating-mass gyroscope system. The system includes a sensor system comprising a vibrating-mass and a plurality of electrodes coupled to the vibrating-mass that are configured to facilitate in-plane motion of the vibrating-mass. The system also includes a gyroscope controller configured to generate a drive signal that is provided to a first set of the plurality of electrodes to provide an in-plane periodic oscillatory motion of the vibrating-mass along a drive axis, to generate a force-rebalance signal that is provided to a second set of the plurality of electrodes to calculate a rotation of the vibrating-mass gyroscope system about an input axis, and to generate a quadrature signal that is provided to a third set of the plurality of electrodes to substantially mitigate quadrature effects associated with the vibrating-mass.

    MEMS sensors and methods for detecting rotation rates
    6.
    发明授权
    MEMS sensors and methods for detecting rotation rates 有权

    公开(公告)号：US09664515B2

    公开(公告)日：2017-05-30

    申请号：US14853592

    申请日：2015-09-14

    申请人： Hanking Electronics, Ltd.

    发明人： Alessandro Rocchi

    IPC分类号： G01C19/5747 ,  G01C19/5762 ,  G01C19/574 ,  G01P15/097 ,  G01P15/14 ,  G01P15/18 ,  G01C19/5755

    CPC分类号： G01C19/574 ,  G01C19/5747 ,  G01C19/5755 ,  G01C19/5762 ,  G01P15/097 ,  G01P15/14 ,  G01P15/18

    摘要： Micro-electro-mechanical-systems (MEMS) sensors and methods for detecting rates of rotation thereof. The MEMS sensor has at least one driving mass that oscillates along the x-axis, and at least one sensing mass coupled to the driving mass so that the sensing and driving masses move relative to each other in the x direction and are coupled for rotation together about the y and/or z axes. At least one anchor spring couples the driving or sensing mass to an anchor secured to a substrate. Rotation of the MEMS sensor is sensed by sensing relative movement between the substrate and sensing mass. During its oscillation, the driving mass generates an imbalance of the driving and sensing masses with respect to the anchor, and Coriolis forces cause the sensing and driving masses to rotate together about the y or z axis when the MEMS sensor rotates about the y or z axis.

    PHYSICAL QUANTITY SENSOR, SENSOR DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT
    7.
    发明申请
    PHYSICAL QUANTITY SENSOR, SENSOR DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT 审中-公开
    物理量传感器，传感器设备，电子设备和移动对象

    公开(公告)号：US20170074658A1

    公开(公告)日：2017-03-16

    申请号：US15260757

    申请日：2016-09-09

    申请人： Seiko Epson Corporation

    发明人： Satoru TANAKA

    IPC分类号： G01C19/5755 ,  G01C19/5769

    CPC分类号： G01C19/5755 ,  G01C19/5769 ,  G01P15/125 ,  G01P2015/0831 ,  G01P2015/0837 ,  G01P2015/0874

    摘要： A physical quantity sensor includes a base substrate, a movable portion that is oscillatably provided around an axis while facing the base substrate and that is divided into a first movable portion and a second movable portion, a first fixed electrode that is disposed on the base substrate facing the first movable portion, and a second fixed electrode that is disposed on the base substrate facing the second movable portion. The first fixed electrode and the second fixed electrode are configured so as to offset at least a part of a difference between a first fringe capacitance, which is between the first movable portion and the first fixed electrode, and a second fringe capacitance, which is between the second movable portion and the second fixed electrode.

    摘要翻译： 一种物理量传感器，包括基底基板，可动部分，其围绕轴线可摆动地设置，同时面向基底基板并分为第一可动部分和第二可动部分，第一固定电极设置在基底基板上 面对第一可移动部分，以及第二固定电极，其设置在与第二可动部分相对的基底基板上。 第一固定电极和第二固定电极被配置为偏移第一可移动部分和第一固定电极之间的第一条纹电容和第二条纹电容之间的差异的至少一部分， 第二可动部和第二固定电极。

    Micromachined 3-axis accelerometer with a single proof-mass
    8.
    发明授权
    Micromachined 3-axis accelerometer with a single proof-mass 有权
    微加工三轴加速度计，具有单个质量

    公开(公告)号：US09455354B2

    公开(公告)日：2016-09-27

    申请号：US13821853

    申请日：2011-09-18

    申请人： Cenk Acar

    发明人： Cenk Acar

    IPC分类号： G01P15/18 ,  H01L29/84 ,  G01C19/5755 ,  G01P15/125 ,  G01P15/08

    CPC分类号： H01L29/84 ,  B81B7/04 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/051 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/056 ,  B81B2203/058 ,  B81B2207/094 ,  G01C19/5755 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0848

    摘要： This document discusses, among other things, an inertial measurement system including a device layer including a single proof-mass 3-axis accelerometer, a cap wafer bonded to a first surface of the device layer, and a via wafer bonded to a second surface of the device layer, wherein the cap wafer and the via wafer are configured to encapsulate the single proof-mass 3-axis accelerometer. The single proof-mass 3-axis accelerometer can be suspended about a single, central anchor, and can include separate x, y, and z-axis flexure bearings, wherein the x and y-axis flexure bearings are symmetrical about the single, central anchor and the z-axis flexure is not symmetrical about the single, central anchor.

    摘要翻译： 该文件尤其涉及一种包括装置层的惯性测量系统，该装置层包括单一的证明质量的3轴加速度计，与该装置层的第一表面结合的盖片晶片，以及接合到第二表面的通孔晶片 所述器件层，其中所述盖晶片和所述通孔晶片被配置为封装所述单个校验质量的3轴加速度计。 单个质量3轴加速度计可以悬挂在单个中心锚固件上，并且可以包括单独的x，y和z轴挠曲轴承，其中x和y轴挠曲轴承关于单个中心锚定体是对称的 锚和z轴弯曲对于单个中心锚不是对称的。

    ROTATION DETECTION SENSOR
    10.
    发明申请
    ROTATION DETECTION SENSOR 审中-公开
    旋转检测传感器

    公开(公告)号：US20160169677A1

    公开(公告)日：2016-06-16

    申请号：US14930076

    申请日：2015-11-02

    申请人： Samsung Electro-Mechanics Co., Ltd.

    发明人： Won HAN ,  Jong Woon KIM

    IPC分类号： G01C19/5755

    CPC分类号： G01C19/5755 ,  G01P15/09

    摘要： A rotation detection sensor is provided. The rotation detection sensor includes a fixed member spaced apart from a mass body, a first flexible member connecting the mass body and the fixed member to each other in a first direction, a second flexible member connecting the mass body and the fixed member to each other in a second direction perpendicular to the first direction, and membranes connecting the mass body and the fixed member to each other, the second flexible member being disposed between the membranes.

    摘要翻译： 提供旋转检测传感器。 旋转检测传感器包括与质量体间隔开的固定部件，将质量体和固定部件沿第一方向彼此连接的第一柔性部件，将质量体与固定部件连结的第二柔性部件 在垂直于第一方向的第二方向上，以及将质量体和固定构件彼此连接的膜，第二柔性构件设置在膜之间。