公开(公告)号：US20110084591A1

公开(公告)日：2011-04-14

申请号：US12972299

申请日：2010-12-17

Applicant: Zhong-Wei CHEN ,  Juying Dou

Inventor： Zhong-Wei CHEN ,  Juying Dou

IPC: H01J1/20

CPC classification number: H01J37/063 ,  H01J1/16 ,  H01J3/027 ,  H01J37/065 ,  H01J2237/06316 ,  H01J2237/06375

Abstract: A thermal field emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source is disclosed. Embodiments disclose changing coating shape, coating position and shorten emitter length to extend the lifetime of the field emission cathode.

Abstract translation: 公开了一种在电子显微镜中使用的热场发射阴极，临界尺寸检查工具，电子束光刻机，电子束测试仪和其他电子束相关系统作为电子源。 实施例公开了改变涂层形状，涂层位置和缩短发射极长度以延长场致发射阴极的寿命。