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    Electron gun arrangement
    5.
    发明授权
    Electron gun arrangement 有权
    电子枪安排

    公开(公告)号：US08957390B2

    公开(公告)日：2015-02-17

    申请号：US14179283

    申请日：2014-02-12

    申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbH

    发明人： Pavel Adamec

    IPC分类号： H01J37/073 ,  H01J37/02 ,  H01J37/063 ,  H01J37/24

    CPC分类号： H01J37/063 ,  H01J3/027 ,  H01J37/073 ,  H01J2237/022

    摘要： A gun arrangement configured for generating a primary electron beam for a wafer imaging system is described. The arrangement includes a controller configured for switching between a normal operation and a cleaning operation, a field emitter having an emitter tip adapted for providing electrons and emitting an electron beam along an optical axis, an extractor electrode adapted for extracting the electron beam from the emitter tip electrode, a suppressor electrode, and at least one auxiliary emitter electrode arranged radially outside the suppressor electrode, and provided as a thermal electron emitter for thermally emitting electrons towards the optical axis.

    摘要翻译： 描述了构造成用于产生用于晶片成像系统的一次电子束的枪装置。 该装置包括配置用于在正常操作和清洁操作之间切换的控制器，具有适于提供电子并沿光轴发射电子束的发射极尖端的场发射器，适于从发射器提取电子束的提取器电极 尖端电极，抑制电极，以及设置在抑制电极的径向外侧的至少一个辅助发射极，并且被设置为用于向光轴发射电子的热电子发射器。

    Electron gun minimizing sublimation of electron source and electron beam exposure apparatus using the same
    6.
    发明授权
    Electron gun minimizing sublimation of electron source and electron beam exposure apparatus using the same 有权
    电子枪使电子源和使用其的电子束曝光装置的升华最小化

    公开(公告)号：US08330344B2

    公开(公告)日：2012-12-11

    申请号：US12586792

    申请日：2009-09-28

    申请人： Hiroshi Yasuda ,  Takeshi Haraguchi ,  Hiroshi Shimoyama ,  Hidekazu Murata

    发明人： Hiroshi Yasuda ,  Takeshi Haraguchi ,  Hiroshi Shimoyama ,  Hidekazu Murata

    IPC分类号： H01J29/50 ,  H01J29/00

    CPC分类号： H01J37/063 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/06316 ,  H01J2237/06375 ,  H01J2237/065

    摘要： An electron gun includes: an electron source; an accelerating electrode; an extraction electrode for extracting electrons from an electron emission surface of the electron source; a suppressor electrode for suppressing emission of electrons from a side surface of the electron source; and an electron beam converging unit for converging an electron beam of thermal field emission electrons emitted from the electron emission surface by applying an electric field to the electron emission surface. The electron beam converging unit is an electrostatic lens electrode which is placed between the extraction electrode and the accelerating electrode and having an opening portion in its center. A voltage is applied to the electrostatic lens electrode to converge the electron beam.

    摘要翻译： 电子枪包括：电子源; 加速电极; 用于从电子源的电子发射表面提取电子的提取电极; 用于抑制从电子源的侧表面发射电子的抑制电极; 以及电子束会聚单元，用于通过向电子发射表面施加电场而会聚从电子发射表面发射的热场发射电子的电子束。 电子束会聚单元是放置在提取电极和加速电极之间并且在其中心具有开口部分的静电透镜电极。 电压施加到静电透镜电极以会聚电子束。

    Device for the field emission of particles and production method
    7.
    发明授权
    Device for the field emission of particles and production method 有权
    颗粒场发射装置及生产方法

    公开(公告)号：US08242674B2

    公开(公告)日：2012-08-14

    申请号：US12449919

    申请日：2008-02-28

    申请人： Josef Sellmair

    发明人： Josef Sellmair

    IPC分类号： H01J1/50

    CPC分类号： H01J37/073 ,  H01J37/063 ,  H01J37/08 ,  H01J37/141 ,  H01J37/143 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/0807 ,  H01J2237/0815 ,  H01J2237/142

    摘要： The invention relates to an apparatus and a method for production of a device for thermally induced field emission of particles for particle optical devices such as in particular electron or ion microscopes, having at least one particle emitter (3) arranged in or pointing into a vacuum space (2) with at least one field emitter tip (4) for the emission of the particles, and having a magnetic field generator (6) attributed to the particle emitter (3) for focussing of the emitted particle beam (5), with the particle emitter (3) with its field emitter tip (4) is built by emitter structures (9) positioned on the surface (7) of a substrate (8) which is turned away from the magnetic field generator (6), and the substrate (8) formed as separating wall between vacuum space (2) and the atmospheric space (10) situated outside the vacuum space (2) at the side (14) of the substrate (8) which is turned away from the emitter structures (9).

    摘要翻译： 本发明涉及一种用于制造用于颗粒光学器件（例如电子或离子显微镜）的颗粒光学器件的热感应场发射装置的装置和方法，所述装置和方法具有布置在或指向真空中的至少一个粒子发射器（3） 具有用于发射颗粒的至少一个场发射器尖端（4）的空间（2），并且具有归因于用于聚焦发射的粒子束（5）的粒子发射器（3）的磁场发生器（6），与 具有其场发射极尖端（4）的粒子发射器（3）由位于离开磁场发生器（6）的衬底（8）的表面（7）上的发射器结构（9）构成，并且 基板（8），其形成为位于真空空间（2）和位于真空空间（2）外侧的大气空间（10）之间的分离壁，所述空间（2）位于离开发射器结构的基板（8）的侧面（14） 9）。

    SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF
    8.
    发明申请
    SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF 审中-公开
    简化粒子发射器及其操作方法

    公开(公告)号：US20120091359A1

    公开(公告)日：2012-04-19

    申请号：US12910240

    申请日：2010-10-22

    申请人： Stefan LANIO ,  Jürgen FROSIEN

    发明人： Stefan LANIO ,  Jürgen FROSIEN

    IPC分类号： H01J3/14

    CPC分类号： H01J37/063 ,  H01J37/06 ,  H01J37/08 ,  H01J37/09 ,  H01J37/16 ,  H01J2237/06375

    摘要： An emitter assembly for emitting a charged particle beam along an optical axis is described. The emitter assembly being housed in a gun chamber and includes an emitter having an emitter tip, wherein the emitter tip is positioned at a first plane perpendicular to the optical axis and wherein the emitter is configured to be biased to a first potential, an extractor having an opening, wherein the opening is positioned at a second plane perpendicular to the optical axis and wherein the extractor is configured to be biased to a second potential, wherein the second plane has a first distance from the first plane of 2.25 mm and above.

    摘要翻译： 描述了用于沿光轴发射带电粒子束的发射器组件。 发射器组件被容纳在枪室中并且包括具有发射极尖端的发射器，其中发射极尖端位于垂直于光轴的第一平面处，并且其中发射器被配置为偏置到第一电位，提取器具有 开口，其中所述开口定位在垂直于所述光轴的第二平面处，并且其中所述提取器构造成被偏置到第二电位，其中所述第二平面具有距离所述第一平面2.25mm及以上的第一距离。

    ELECTRON GUN
    9.
    发明申请
    ELECTRON GUN 有权
    电子枪

    公开(公告)号：US20120062094A1

    公开(公告)日：2012-03-15

    申请号：US13322025

    申请日：2010-04-14

    申请人： Mikio Ichihashi ,  Tadashi Onishi ,  Shunichi Watanabe ,  Keiji Tamura

    发明人： Mikio Ichihashi ,  Tadashi Onishi ,  Shunichi Watanabe ,  Keiji Tamura

    IPC分类号： H01J29/48 ,  H01J29/00

    CPC分类号： H01J37/063 ,  H01J37/073 ,  H01J37/141 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/065 ,  H01J2237/26

    摘要： The present invention has an object to provide a cold cathode field-emission electron gun with low aberration, to thereby provide a high-brightness electron gun even in the case of a large current. The present invention provides a field-emission electron gun which extracts an electron beam from a cathode and converges the extracted electron beam, the field-emission electron gun including: a magnetic field lens which is provided such that the cathode is disposed inside of a magnetic field of the lens; and an extraction electrode for extracting electrons from the cathode, the extraction electrode being formed into a cylindrical shape without an aperture structure. The present invention can provide an electron gun having a function of converging an electron beam using a magnetic field, the electron gun which is capable of reducing an incidental electrostatic lens action and has small aberration and high brightness.

    摘要翻译： 本发明的目的是提供一种具有低像差的冷阴极场致发射电子枪，从而即使在大电流的情况下也提供高亮度电子枪。 本发明提供一种场致发射电子枪，其从阴极提取电子束并使所提取的电子束会聚，该场发射电子枪包括：磁场透镜，其被设置为使得阴极设置在磁性 镜头领域; 以及用于从阴极提取电子的引出电极，所述引出电极形成为没有孔结构的圆筒形状。 本发明可以提供一种电子枪，其具有使用磁场会聚电子束的功能，该电子枪能够减少偶然的静电透镜作用并且具有小的像差和高亮度。