公开(公告)号：US20230290619A1

公开(公告)日：2023-09-14

申请号：US17902745

申请日：2022-09-02

Applicant: KIOXIA CORPORATION

Inventor： Takeharu MOTOKAWA ,  Noriko Sakurai ,  Hideaki Sakurai

IPC: H01J37/32

CPC classification number: H01J37/32669 ,  H01J37/32532 ,  H01J37/32522

Abstract: According to one embodiment, a plasma treatment apparatus includes a first chamber, an electrode provided in the first chamber and having a surface, and a conveyance mechanism that places a carrier structure holding a treatment target in the first chamber such that a ferromagnetic body of the carrier structure is disposed between the surface of the electrode and the treatment target. The ferromagnetic body has a single polarity within a plane substantially parallel to the surface of the electrode.