公开(公告)号：US20130098754A1

公开(公告)日：2013-04-25

申请号：US13692821

申请日：2012-12-03

Applicant: Korea Institute of Science and Technology

Inventor： Ji Won CHOI ,  Seok Jin YOON ,  Won Kook CHOI ,  Jin Sang KIM ,  Chong Yun KANG ,  Ho Won JANG ,  Keun JUNG

IPC: C23C14/08

CPC classification number: C23C14/086 ,  C23C14/08 ,  C23C14/3414 ,  H01B1/08

Abstract: Disclosed are a transparent conductive composition including a material of the following formula, a target, a transparent conductive thin film using the target, and a method for fabricating the same. The disclosed transparent conductive composition and transparent conductive thin film have superior conductivity (low resistivity) and high light transmittance. Especially, they may be usefully applied for the flexible electronic devices, which may be called the core of the future display industry, because they have low resistivity of not greater than 10−3 Ω·cm and a high light transmittance of at least 90% even when deposition is carried out at room temperature. AlxZn1-xO In the above formula, x is within the range of 0.04≦x≦0.063.

Abstract translation: 公开了一种透明导电组合物及其制造方法，该导电组合物包括下式的材料，靶材，使用该靶材的透明导电薄膜。 所公开的透明导电组合物和透明导电薄膜具有优异的导电性（低电阻率）和高透光率。 特别地，它们可以有用地应用于可能被称为未来显示器行业的核心的柔性电子器件，因为它们具有不大于10-3Ω·cm的低电阻率和至少90％的高透光率 即使在室温下进行沉积也是如此。 AlxZn1-xO在上式中，x在0.04 @ x @ 0.063的范围内。