公开(公告)号：US20100293770A1

公开(公告)日：2010-11-25

申请号：US12864060

申请日：2008-11-26

申请人： Toshiyuki Fuyutsume ,  Taro Nishino ,  Hisashi Yamazaki ,  Noboru Tamura ,  Nakaba Ichikawa ,  Masaki Aruga

发明人： Toshiyuki Fuyutsume ,  Taro Nishino ,  Hisashi Yamazaki ,  Noboru Tamura ,  Nakaba Ichikawa ,  Masaki Aruga

IPC分类号： H04R17/00

CPC分类号： H03H3/02 ,  C23C4/04 ,  C23C4/06 ,  C23C4/10 ,  H03H3/007 ,  H03H3/04 ,  H03H3/10 ,  H03H9/02559 ,  Y10T29/42 ,  Y10T29/49147 ,  Y10T29/49155

摘要： Provided is a method for manufacturing an acoustic wave device that has an excellent temperature coefficient of frequency (TCF) and high accuracy of IDT pattern forming and is capable of resisting high temperature processing of 200 degrees or more. The method for manufacturing an acoustic wave device according to the present invention includes forming an IDT (2) on a principal surface (1a) of a piezoelectric substrate (1), and forming a film by thermal spraying a material (3) having a smaller linear thermal expansion coefficient than the piezoelectric substrate onto an opposite principal surface (1b) of the piezoelectric substrate (1) where the IDT (2) is formed.

摘要翻译： 提供一种具有优异的频率温度系数（TCF）和高精度的IDT图案形成的声波器件的制造方法，能够抵抗200度以上的高温处理。 根据本发明的声波装置的制造方法包括在压电基板（1）的主表面（1a）上形成IDT（2），并通过热喷涂形成薄膜的材料（3） 线性热膨胀系数比形成有IDT（2）的压电基板（1）的相对的主表面（1b）上的压电基板。

公开(公告)号：US20090179521A1

公开(公告)日：2009-07-16

申请号：US12412446

申请日：2009-03-27

申请人： Shin Saijou ,  Toshiyuki Fuyutsume

发明人： Shin Saijou ,  Toshiyuki Fuyutsume

IPC分类号： H01L41/047 ,  H01L41/18 ,  H01L41/22

CPC分类号： H03H9/0222 ,  H03H9/131 ,  H03H9/14541 ,  Y10T29/42

摘要： A boundary acoustic wave device includes a piezoelectric substance, a dielectric substance laminated on the piezoelectric substance, and an electrode film disposed at a boundary between the piezoelectric substance and a dielectric substance, the device utilizing a boundary acoustic wave propagating along the boundary, wherein the electrode film is any one Au alloy electrode film of an Au alloy electrode film including Cu at a ratio of about 0.01% to about 4.8% by weight, an Au alloy electrode film including Pd at a ratio of about 0.01% to about 6.8% by weight, and an Au alloy electrode film including Ni at a ratio of about 0.01% to about 3.5% by weight.

摘要翻译： 弹性边界波装置包括：压电体，层叠在压电体上的电介质，以及配置在压电体和电介质之间的边界的电极膜，利用沿边界传播的边界声波， 电极膜是包含比例为约0.01〜4.8重量％的Cu的Au合金电极膜的任何一个Au合金电极膜，包含比例为约0.01〜6.8％的Pd的Au合金电极膜， 以及包含Ni的Au合金电极膜，其比例为约0.01重量％至约3.5重量％。