公开(公告)号：US08004028B2

公开(公告)日：2011-08-23

申请号：US12385969

申请日：2009-04-24

申请人： Kenzo Fukuyoshi ,  Tadashi Ishimatsu ,  Keisuke Ogata ,  Mitsuhiro Nakao ,  Akiko Uchibori

发明人： Kenzo Fukuyoshi ,  Tadashi Ishimatsu ,  Keisuke Ogata ,  Mitsuhiro Nakao ,  Akiko Uchibori

IPC分类号： H01L31/062 ,  H01L31/113

CPC分类号： H01L27/14601 ,  H01L27/14627 ,  H01L27/14685

摘要： A solid state imaging device including photoelectric conversion devices which are arranged two-dimensionally; a color filter including a plurality of picture elements, each disposed corresponding to each of the photoelectric conversion devices; and a plurality of transfer lenses each disposed corresponding to each of the picture elements, formed of a thermoset acrylic resin, and formed directly on each of the picture elements, wherein a gap between neighboring transfer lenses is not more than 0.035 μm, and a contact length between neighboring transfer lenses is within the range of 3-80% of the pitch of the plurality of transfer lenses.

摘要翻译： 一种包括二维布置的光电转换装置的固态成像装置; 包括多个像素的滤色器，每个图像元素分别对应于每个光电转换器件; 以及多个转印透镜，每个透镜对应于由热固性丙烯酸树脂形成的每个图像元素，并且直接形成在每个像素上，其中相邻转印透镜之间的间隙不大于0.035μm，并且接触 相邻转印透镜之间的长度在多个转印透镜的间距的3-80％的范围内。

公开(公告)号：US20070058068A1

公开(公告)日：2007-03-15

申请号：US11599373

申请日：2006-11-15

申请人： Kenzo Fukuyoshi ,  Tadashi Ishimatsu ,  Keisuke Ogata ,  Mitsuhiro Nakao ,  Akiko Uchibori

发明人： Kenzo Fukuyoshi ,  Tadashi Ishimatsu ,  Keisuke Ogata ,  Mitsuhiro Nakao ,  Akiko Uchibori

IPC分类号： G02B13/16 ,  H04N5/225 ,  H01L21/82

CPC分类号： H01L27/14601 ,  H01L27/14627 ,  H01L27/14685

摘要： A method of manufacturing a solid state imaging device having photoelectric conversion devices, the method including: 1) forming a plurality of color filters differing in color from each other, 2) forming a transparent resin layer on the color filters, 3) forming an etching control layer on the transparent resin layer, the etching control layer being enabled to be etched at a different etching rate from the etching rate of the transparent resin layer, 4) forming a lens master on the etching control layer by using a heat-flowable resin material, 5) transferring a pattern of the lens master to the etching control layer by dry etching to form an intermediate micro lens, and 6) transferring a pattern of the intermediate micro lens to the transparent resin layer by dry etching to form the transfer lenses.

摘要翻译： 一种制造具有光电转换装置的固态成像装置的方法，所述方法包括：1）形成多个不同颜色的滤色器，2）在滤色器上形成透明树脂层，3）形成蚀刻 控制层，能够以与透明树脂层的蚀刻速率不同的蚀刻速率蚀刻蚀刻控制层，4）通过使用热可流动树脂在蚀刻控制层上形成透镜母版 材料，5）通过干蚀刻将透镜主体的图案转移到蚀刻控制层以形成中间微透镜，以及6）通过干蚀刻将中间微透镜的图案通过干蚀刻转印到透明树脂层上以形成转印透镜 。