公开(公告)号：US5228838A

公开(公告)日：1993-07-20

申请号：US936035

申请日：1992-08-26

申请人： Thomas Gebele ,  Wolfgang Buschbeck

发明人： Thomas Gebele ,  Wolfgang Buschbeck

IPC分类号： B01J3/00 ,  F04B37/14

CPC分类号： B01J3/006 ,  F04B37/14

摘要： For the evacuation of a low-vacuum chamber (4) and of a high-vacuum chamber (5), two pump trains (6, 7) are provided, each consisting of a vacuum pump unit (8, 9) and a forepump unit (10, 11). The forepump unit (11) of the pump train (7) of the high-vacuum chamber (5) can draw selectively from the vacuum pump unit (9) of the high-vacuum chamber (5) or from a high-vacuum pump unit (12) connected likewise to the high-vacuum chamber (5). The vacuum pump unit (9) can aspirate either from the highvacuum chamber (5) or from the low-vacuum chamber (4) and discharge to the forepump unit (10) of pump train (6) or to the forepump unit (11) of pump train (7).

摘要翻译： 为了排空低真空室（4）和高真空室（5），提供了两个泵系列（6,7），每个泵系列由真空泵单元（8,9）和前级泵单元 （10,11）。 高真空室（5）的泵排（7）的前泵单元（11）可以从高真空室（5）的真空泵单元（9）或高真空泵单元 （12）同样连接到高真空室（5）。 真空泵单元（9）可以从高真空室（5）或低真空室（4）吸出并排出到泵系（6）的前置泵单元（10）或前泵单元（11） 的泵列车（7）。

公开(公告)号：US20070068802A1

公开(公告)日：2007-03-29

申请号：US11254427

申请日：2005-10-20

申请人： Thomas Gebele ,  Oliver Heimel ,  Thomas Klug

发明人： Thomas Gebele ,  Oliver Heimel ,  Thomas Klug

IPC分类号： C23C14/00

CPC分类号： C23C14/50

摘要： The invention relates to a substrate carrier comprising two vertical plates and two horizontal plates. In order for the substrate during its transport through a sputter unit to be coated uniformly in its margin regions, a lever arrangement is provided between the two vertical plates. The lever arrangement comprises at least one horizontal web which under the effect of heat expands to a lesser degree than the horizontal plates.

摘要翻译： 本发明涉及一种包括两个垂直板和两个水平板的基板载体。 为了使衬底在其通过溅射单元的传输期间均匀地涂覆在其边缘区域中时，在两个垂直板之间设置有杆装置。 杠杆装置包括至少一个水平腹板，其在热的作用下膨胀到比水平板更小的程度。

公开(公告)号：US06857307B2

公开(公告)日：2005-02-22

申请号：US10149179

申请日：2000-12-22

申请人： Thomas Gebele ,  Jürgen Henrich

发明人： Thomas Gebele ,  Jürgen Henrich

IPC分类号： G01M3/32 ,  G01N15/08

CPC分类号： G01M3/3281

摘要： The invention relates to a method and device for the determination of the gas permeability of a container, for example, a PET bottle. Said container is enclosed by a sheath, which hermetically seals the container from the environment. The intermediate space, between the container and the sheath, has only a very small volume in comparison to the volume of the container. The determination of the gas permeability is begun by bringing said intermediate space to, for example, atmospheric pressure, whilst the container is filled with a test gas by means of a special feed, until the container is at an overpressure relative to the intermediate space. The pressure in the intermediate space increases by means of the resulting diffusion of the test gas through the wall of the container into said intermediate space. The increase in pressure per unit time is a measure of the permeability of the container.

摘要翻译： 本发明涉及一种用于确定容器（例如PET瓶）的透气性的方法和装置。 所述容器由护套封闭，护套将容器与环境密封。 在容器和护套之间的中间空间与容器的体积相比只有非常小的体积。 通过使所述中间空间达到例如大气压，同时通过特殊进料填充试验气体，直到容器相对于中间空间处于过压状态，开始确定气体渗透性。 中间空间中的压力通过试验气体通过容器的壁进入所述中间空间而增加。 每单位时间的压力增加是容器的渗透性的量度。