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11.发明授权Optical type encoder including diffraction grating for producing interference fringes that are processed to measure displacement 失效光学型编码器包括用于产生被处理以测量位移的干涉条纹的衍射光栅
公开(公告)号：US4912320A
公开(公告)日：1990-03-27
申请号：US321155
申请日：1989-03-09
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An optical type encoder comprises a light source for supplying a light beam for illuminating a diffraction grating formed on a movable scale, photoelectric converting means for photoelectrically converting interference fringes formed by causing a plurality of diffracted lights created by the diffraction grating to interfere with one another to measure the displacement of the movable scale and outputting a predetermined signal, detecting means for receiving a predetermined diffracted light created by the diffraction grating and detecting any fluctuation of the intensity thereof, and control means for modulating the intensity of the light beam illuminating the diffraction grating, on the basis of a signal from the detecting means, so that the amplitude of the output signal from the photoelectric converting means may become substantially constant.
摘要翻译： 一种光学型编码器包括用于提供用于照射形成在可移动刻度上的衍射光栅的光束的光源，用于光电转换由衍射光栅产生的多个衍射光形成的干涉条纹相互干扰的光电转换装置 测量可移动刻度的位移并输出预定信号;检测装置，用于接收由衍射光栅产生的预定衍射光并检测其强度的波动;以及控制装置，用于调制照射衍射的光束的强度 基于来自检测装置的信号，使得来自光电转换装置的输出信号的幅度变得基本恒定。
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12.发明授权
公开(公告)号：US5159192A
公开(公告)日：1992-10-27
申请号：US641891
申请日：1991-01-16
申请人： Tetsuharu Nishimura , Koh Ishizuka
发明人： Tetsuharu Nishimura , Koh Ishizuka
CPC分类号： H03M1/30 , G01D5/34715
摘要： A rotary encoder and a scanning system using the same for detecting rotation of a galvano scanner which comprises a rotary scale coupled to a rotating driver, a scale with slits formed at a non-uniform pitch circumferentially on the rotary scale within a limited rotation angle and detection means for detecting a rotation status by reading the slits.
摘要翻译： 一种旋转编码器和使用该旋转编码器的扫描系统，用于检测电动扫描器的旋转，其包括耦合到旋转驱动器的旋转刻度，具有在受限旋转角度内在旋转刻度上沿圆周非均匀间距形成的狭缝的刻度， 用于通过读取狭缝来检测旋转状态的检测装置。
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公开(公告)号：US5146085A
公开(公告)日：1992-09-08
申请号：US522051
申请日：1990-05-11
申请人： Koh Ishizuka , Tetsuharu Nishimura
发明人： Koh Ishizuka , Tetsuharu Nishimura
摘要： A light beam is incident on a first position on a scale at such an angle that diffracted lights substantially coincide with an incident optical path, and two diffracted lights are directed along a substantially common optical path and are incident on a second position symmetrical with the first position. An interference light formed by rediffracted lights reflected from the second position is detected to thereby detect the displaced state of the scale.
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公开(公告)号：US5066130A
公开(公告)日：1991-11-19
申请号：US347397
申请日：1989-05-04
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A displacement measuring apparatus comprises a scale relatively displaced to an irradiating beam, a reading head to read the scale by the irradiating beam, and control device to control the apparatus for avoiding substantially the leakage of the irradiating beam out of the apparatus in response to the positional error of the scale and the irradiating beam.
摘要翻译： 位移测量装置包括与照射光束相对位移的标尺，用于通过照射光束读取标尺的读取头以及控制装置，用于控制装置，以便基本上避免照射光束从设备中泄漏出来，以响应于 刻度和照射光束的位置误差。
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公开(公告)号：US5051579A
公开(公告)日：1991-09-24
申请号：US532108
申请日：1990-06-01
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An encoder for measuring movement of an optical scale by photoelectrically converting light from the optical scale obtained by applying light from a light source to the optical scale, by means of light receiving element, includes detector for detecting a variation in intensity of the light received by the light receiving element and a comparator for comparing a signal from the detector with a predetermined reference signal. Consequently, a predetermined alarm signal is generated on the basis of the result of comparison obtained from the comparator. A measuring system for detecting a moving condition of an object, includes an optical scale connected to the object; a light source for applying light to the optical scale; a first detector for receiving light from the optical scale and for detecting the moving condition of the object; a second detector for detecting a variation in intensity of the light received by the first detector; and a signal forming device for forming a predetermined alarm signal on the basis of an output signal from the second detector.
摘要翻译： 一种编码器，用于通过光电转换由光源将光从光源施加到光刻尺上的光通过光接收元件测量光标的移动，包括用于检测由光接收元件接收的光的强度变化的检测器 光接收元件和用于将来自检测器的信号与预定参考信号进行比较的比较器。 因此，基于从比较器获得的比较结果来生成预定的报警信号。 用于检测物体的移动状态的测量系统包括连接到物体的光学刻度; 用于将光施加到光学刻度的光源; 第一检测器，用于接收来自光刻尺的光并检测物体的移动状态; 第二检测器，用于检测由第一检测器接收的光的强度变化; 以及信号形成装置，用于根据来自第二检测器的输出信号形成预定报警信号。
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16.发明授权
公开(公告)号：US5038491A
公开(公告)日：1991-08-13
申请号：US369862
申请日：1989-06-22
CPC分类号： G01D5/24442 , G01D5/24476 , G01D5/347
摘要： A scale, for measuring the displacement of an object to be examined, has a division and a mark for alignment of the division, and a displacement measuring apparatus, for measuring the displacement of a scale, has a device for reading the division of the scale and a detector for detecting the positional error of the division relative to the direction of the displacement.
摘要翻译： 用于测量待检测物体的位移的刻度具有划分的划分和标记，并且用于测量刻度的位移的位移测量装置具有用于读取刻度的分割的装置 以及用于检测相对于位移方向的分割的位置误差的检测器。
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公开(公告)号：US5021649A
公开(公告)日：1991-06-04
申请号：US496259
申请日：1990-03-20
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An encoder of this invention radiates a light beam onto an optical scale, in which a reflection film is formed on a surface of a relief type diffraction grating formed on one surface of a light-transmission substrate, from a surface opposite to the formation surface of the diffraction grating, and detects a change in intensity of interference light caused by diffracted light produced by the diffraction grating, thereby measuring a displacement of the optical scale.
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公开(公告)号：US4979826A
公开(公告)日：1990-12-25
申请号：US380038
申请日：1989-07-14
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A displacement measuring apparatus has an illuminating device for illuminating a diffraction grating with a radiation beam, an optical system for directing first and second diffracted beams created by the diffraction grating with to the diffraction grating, the optical system being provided so that the first and second diffracted beams have a common optical path and travel in opposite directions along the optical path. In addition, a device receives an interference beam formed by first and second re-diffracted beams created by the first and second diffracted beams being diffracted by the diffraction grating, and outputs a signal conforming to the displacement of the diffraction grating relative to the radiation beam.
摘要翻译： 位移测量装置具有用于用辐射束照射衍射光栅的照明装置，用于将由衍射光栅产生的第一和第二衍射光束引导到衍射光栅的光学系统，所述光学系统被设置成使得第一和第二 衍射光束具有公共光路并沿着光路在相反方向上行进。 此外，设备接收由由衍射光栅衍射的第一和第二衍射光束产生的第一和第二重衍射光束形成的干涉光束，并且输出符合衍射光栅相对于辐射束的位移的信号 。
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19.发明授权
公开(公告)号：US5532819A
公开(公告)日：1996-07-02
申请号：US392617
申请日：1995-02-22
申请人： Koh Ishizuka , Tetsuharu Nishimura
发明人： Koh Ishizuka , Tetsuharu Nishimura
CPC分类号： G01D5/38
摘要： A rotary detector has a diffraction grating arranged circumferentially and a center at substantially the center of rotation. The rotary detector measures rotational information of a rotating object. The rotary detector is provided with a light source, an irradiating optical system for irradiating luminous flux from the light source to a first point on the diffraction grating, and an optical system for guiding two diffracted luminous fluxes emerging from the first point at an emerging angle and diffracted to have a same order but different signs to be incident at a second point on the diffraction grating at an incident angle relative to a rotational direction of the grating, with the second point positioned substantially opposite to the first point on the diffraction grating with respect to the center of the rotation, and the incident angle is the same angle as the emerging angle. A wave superposing optical system superposes two rediffracted lights diffracted at the second point with the order of the same signs at the first point, respectively, and a detector detects the superposed rediffracted lights. The rotational information of the rotating object is thus measured by the detector.
摘要翻译： 旋转检测器具有周向布置的衍射光栅和大致为旋转中心的中心。 旋转检测器测量旋转物体的旋转信息。 旋转检测器设置有光源，用于将来自光源的光通量照射到衍射光栅上的第一点的照射光学系统，以及用于引导从出射角度从第一点出射的两个衍射光束的光学系统 并衍射成具有与衍射光栅相对于光栅的旋转方向入射角相对于入射在衍射光栅上的第二点的相同次序但不同的符号，其中第二点与衍射光栅上的第一点基本相对， 相对于旋转中心，入射角度与出射角度相同。 波叠加光学系统将分别在第一点处具有相同符号的次序的第二点处衍射的两个衍射光叠加在一起，并且检测器检测叠加的红光。 因此，由检测器测量旋转物体的旋转信息。
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公开(公告)号：US5126562A
公开(公告)日：1992-06-30
申请号：US605437
申请日：1990-10-30
申请人： Koh Ishizuka , Tetsuharu Nishimura
发明人： Koh Ishizuka , Tetsuharu Nishimura
摘要： An encoder includes a first polarizing beam splitter for splitting a beam into first and second beams, and a first .lambda./4 plate arranged in respective first and second optical paths. A first optical device causes the beams to be incident on a diffraction grating so that positive first and negative second mode diffracted beams travel along the first and second optical paths, respectively, and superposes the diffracted beams on each other. A second polarizing beam splitter splits the diffracted beams from each other, and a second .lambda./4 plate is arranged in third and fourth optical paths for the diffracted beams, respectively. A second optical device causes the diffracted beams to be incident on the diffraction grating so that positive and negative first mode rediffracted beams travel along the third and fourth optical paths, respectively, and superposes the rediffracted beams on each other. A converting device causes the rediffracted beams to interfere with each other to form an interfered beam, which is converted into an electrical signal. A difference between optical path lengths of beams incident on the converting device through the first and fourth paths and through the second and fourth paths, and a difference between optical path lengths of beams incident on the converting device through the first and third paths and through the second and third paths are larger than a coherent length of the light source beam.
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