公开(公告)号：US20140101964A1

公开(公告)日：2014-04-17

申请号：US13650044

申请日：2012-10-11

Applicant: LAM RESEARCH CORPORATION

Inventor： Stephen M. SIRARD ,  Diane HYMES ,  Alan M. SCHOEPP ,  Ratchana LIMARY

IPC: F26B13/30 ,  F26B5/06 ,  F25B21/02

CPC classification number: H01L21/67034 ,  H01L21/02057 ,  H01L21/6831

Abstract: An apparatus for delamination drying a substrate is provided. A chamber for receiving a substrate is provided. A chuck supports and clamps the substrate within the chamber. A temperature controller controls the temperature of the substrate and is able to cool the substrate. A vacuum pump is in fluid connection with the chamber. A tilting mechanism is able to tilt the chuck at least 90 degrees.

Abstract translation: 提供了一种用于分层干燥基板的设备。 提供了用于接收基板的室。 卡盘支撑并夹紧腔室内的基底。 温度控制器控制衬底的温度并能够冷却衬底。 真空泵与腔室流体连接。 倾斜机构能够将卡盘倾斜至少90度。