公开(公告)号：US20140366360A1

公开(公告)日：2014-12-18

申请号：US14470477

申请日：2014-08-27

Applicant: Lam Research Corporation

Inventor： Rish Chhatre ,  David Schaefer ,  Sung Lee ,  Dan Haber

IPC: H01L21/687 ,  H01L21/67

CPC classification number: H01L21/68735 ,  H01L21/67069 ,  H01L21/6719 ,  Y10T29/49826 ,  Y10T29/49863 ,  Y10T29/53 ,  Y10T29/53657

Abstract: A kit comprising an installation fixture, a plurality of mechanical fasteners and an embedding tool is provided which allows for an elastomer band to be disposed in a mounting groove around a semiconductor substrate support in a manner that relieves the internal stresses of the elastomer band, leading to an elastomer band with a longer operational lifetime. The installation fixture is secured to a substrate support with mechanical fasteners. An elastomer band is placed around an outer circumference of the installation fixture and rotated back and forth to relieve internal stresses of the elastomer band. The fixture is inverted and the elastomer band is slid vertically off the fixture and into the mounting groove. An embedding tool can be used to completely insert the elastomer band into the mounting groove.

Abstract translation: 提供一种包括安装夹具，多个机械紧固件和嵌入工具的套件，其允许弹性体带以减轻弹性体带的内部应力的方式设置在半导体衬底支撑件周围的安装槽中，引导 到具有更长使用寿命的弹性体带。 安装夹具用机械紧固件固定到基板支架上。 弹性体带围绕安装夹具的外周放置并且来回旋转以减轻弹性体带的内应力。 夹具被倒置，弹性体带从夹具垂直滑入安装槽。 可以使用嵌入工具将弹性体带完全插入到安装槽中。