公开(公告)号：US10196259B2

公开(公告)日：2019-02-05

申请号：US14985175

申请日：2015-12-30

Applicant: MEMS DRIVE, INC.

Inventor： Gerardo Morabito ,  Xiaolei Liu ,  Guiqin Wang ,  Roman Gutierrez ,  Matthew Ng

IPC: B81B7/00 ,  B81B3/00 ,  H02N1/00

Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.