公开(公告)号：US20160305894A1

公开(公告)日：2016-10-20

申请号：US15093134

申请日：2016-04-07

Applicant: MITUTOYO CORPORATION

Inventor： Sadayuki MATSUMIYA ,  Hidemitsu ASANO ,  Masato KON

IPC: G01N23/04

CPC classification number: G01N23/046 ,  G01N2223/309 ,  G01N2223/3306 ,  G01N2223/3308

Abstract: An XY shift mechanism can shift a rotary table in a two-dimensional direction (XY direction) orthogonal to a rotation axis of the rotary table. By collaborative control of the shift position of the rotary table in the two-dimensional direction in synchronization with the rotation of the rotary table, rotation is made possible about a virtual rotation center that is set at an arbitrary position on the rotary table. The collaborative control of the shift position of the rotary table in the two-dimensional direction also corrects rotation eccentricity owing to the eccentricity of the rotary table. Thus, the virtual rotation center can be set at an arbitrary position on the rotary table, thus enabling obtainment of high resolution tomographic images of a plurality of regions of interest of an object, without the need for repositioning of the object.

Abstract translation: XY移动机构可以使与旋转台的旋转轴正交的二维方向（XY方向）的旋转台移动。 通过与旋转台的旋转同步地与二维方向的旋转台的换档位置协同控制，可以围绕设置在旋转台上的任意位置的虚拟旋转中心进行旋转。 旋转台在二维方向的换档位置的协同控制也由于旋转台的偏心而校正旋转偏心。 因此，可以将虚拟旋转中心设置在旋转台上的任意位置，从而能够获得对象的多个感兴趣区域的高分辨率断层图像，而不需要重新定位对象。