Abstract:
A scale includes: a substrate; scale gratings that are formed on a face of the substrate and has a plurality of gratings at a predetermined interval; and a protective layer that is made of fluoride and covers the scale gratings and an exposed portion of the face of the substrate.
Abstract:
A scale includes: a substrate; scale gratings that are formed on a face of the substrate and has a plurality of gratings at a predetermined interval; and a protective layer that is made of fluoride and covers the scale gratings and an exposed portion of the face of the substrate.
Abstract:
A scale includes a substrate, a metal layer of Ni formed on one principal surface of the substrate, and a scale grating formed on the metal layer. A plurality of gratings of Cr are disposed at a predetermined interval in the scale grating.
Abstract:
A scale includes: a substrate; scale gratings that are formed on a face of the substrate and has a plurality of gratings at a predetermined interval; and a protective layer that is made of fluoride and covers the scale gratings and an exposed portion of the face of the substrate.
Abstract:
A scale includes a base material, scale patterns arranged at a predetermined periodicity on a main surface of the base material, and a fluorine film that covers the scale patterns and is at least partly a monomolecular fluorine compound.
Abstract:
There is provided a measuring tool attachment cover that combines ease of holding and performance (for example, heat insulation). An attachment cover includes a front face layer 110, a rear face layer 120 and an intermediate layer 130. The front face layer 110 and the rear face layer 120 are compact layers with low porosity, and the intermediate layer 130 is a hollow structural layer with higher porosity than the front face layer 110 and the rear face layer 120. The hollow structural layer includes two or more layers with different porosity, and a layer of the two or more layers closer to the front face has higher porosity than a layer closer to the rear face. A direction from the rear face layer 120 to the front face layer 110 is a thickness direction, and a direction orthogonal to the thickness direction is a width direction. The hollow structural layer has elastic modulus distribution in the width direction, and an elastic modulus of a certain area is different from an elastic modulus of an area surrounding the certain area.
Abstract:
A scale includes: a substrate; a first metal layer formed on the substrate; a second metal layer formed on the first metal layer; and scale gratings that are formed on the second metal layer and have a plurality of metal gratings at a predetermined interval, wherein the first metal layer is made of a first metal, wherein the second metal layer is made of a second metal, wherein adhesion of the first metal with the substrate is higher than adhesion of the second metal with the substrate, and wherein a reflectivity of the second metal with respect to a wavelength of a used light is higher than a reflectivity of the first metal layer with respect to the wavelength of the used light.
Abstract:
A scale of a photoelectric encoder includes a base member and gratings on the base member. The gratings can be formed on the surface of the base member by plating and arranged at a prescribed pitch on the base member. The surface of the base member is a roughened surface which is roughened by sandblasting or with a chemical. The gratings are light absorptive gratings or light reflective metal gratings.