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    Scale
    1.
    发明授权
    Scale 有权

    公开(公告)号：US11808611B2

    公开(公告)日：2023-11-07

    申请号：US17174763

    申请日：2021-02-12

    Applicant: MITUTOYO CORPORATION

    Inventor： Kosaku Miyake ,  Toshihiko Aoki

    IPC: G01D5/347

    CPC classification number: G01D5/34707

    Abstract: A scale includes a base material, scale patterns arranged at a predetermined periodicity on a main surface of the base material, and a fluorine film that covers the scale patterns and is at least partly a monomolecular fluorine compound.

    Grating part and manufacturing method thereof
    2.
    发明授权
    Grating part and manufacturing method thereof 有权

    公开(公告)号：US11768322B2

    公开(公告)日：2023-09-26

    申请号：US16907942

    申请日：2020-06-22

    Applicant: MITUTOYO CORPORATION

    Inventor： Toshihiko Aoki ,  Kosaku Miyake

    IPC: G02B5/18

    CPC classification number: G02B5/1814 ,  G02B5/1852 ,  G02B2005/1804

    Abstract: A grating part includes a first transparent substrate having an optical grating on a first principal surface and a second transparent substrate having an optical grating on a first principal surface; a second principal surface of the first substrate on an opposite side from the first principal surface and a second principal surface of the second substrate on an opposite side from the first principal surface are bonded.

    SCALE, ENCODER AND MANUFACTURING METHOD OF SCALE
    3.
    发明申请
    SCALE, ENCODER AND MANUFACTURING METHOD OF SCALE 有权

    公开(公告)号：US20250085138A1

    公开(公告)日：2025-03-13

    申请号：US18815089

    申请日：2024-08-26

    Applicant: MITUTOYO CORPORATION

    Inventor： Kosaku Miyake

    IPC: G01D5/245 ,  B23K26/352

    Abstract: A manufacturing method of a scale includes forming a metal-containing layer on a resin layer that is provided on at least a first face of a substrate, forming an outline of a pattern on the metal-containing layer by irradiating a first laser to the metal-containing layer from a side opposite to the substrate, irradiating a second laser to a margin outside of the outline of the metal-containing layer from a side of a second face of the substrate opposite to the first face, and peeling a part of the metal-containing layer corresponding to the margin.

    SCALE AND MANUFACTURING METHOD OF THE SAME
    4.
    发明公开
    SCALE AND MANUFACTURING METHOD OF THE SAME 审中-公开

    公开(公告)号：US20240200984A1

    公开(公告)日：2024-06-20

    申请号：US18524385

    申请日：2023-11-30

    Applicant: MITUTOYO CORPORATION

    Inventor： Hiroto Kubozono ,  Kosaku Miyake

    IPC: G01D5/20

    CPC classification number: G01D5/2053

    Abstract: A scale includes a substrate, a plurality of scale patterns that are arranged along a measurement direction with a constant period on a surface of the substrate and are made of conductor, and a plurality of dummy patterns that are provided on at least a part of a region on the surface of the substrate where the plurality of scale patterns are not provided, and are made of the same conductors as the plurality of scale patterns. A diameter of a largest circle that can be formed in each of the plurality of dummy patterns centering on a point in each of the plurality of dummy patterns is ¼ or less of the period of the plurality of scale patterns.

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