Apparatus for measuring the emissivity of a semiconductor wafer
    11.
    发明授权
    Apparatus for measuring the emissivity of a semiconductor wafer 失效
    用于测量半导体晶片的发射率的装置

    公开(公告)号:US5597237A

    公开(公告)日:1997-01-28

    申请号:US450659

    申请日:1995-05-30

    申请人: Alexander Stein

    发明人: Alexander Stein

    IPC分类号: G01J5/00 G01N25/00 G01N21/47

    CPC分类号: G01J5/0003

    摘要: Apparatus adapted for use in measuring emissivity of a semiconductor wafer having a radiant energy reflecting surface includes a hollow integrating sphere having first and second spaced apart openings and having an inner surface upon which radiant energy can be distributed. The wafer is disposed with its reflecting surface adjacent the second opening. A first radiant energy detector is disposed on the inner surface of the sphere to detect the distributed energy. First means directs a beam of radiant energy through the first opening in the sphere in such manner that the beam passes through the sphere and the second opening to strike the wafer reflecting surface and is thereupon reflected into the sphere, the reflected energy being distributed upon the inner surface of the sphere and being detected by said first detector. Second means coupled to said first detector and responsive to its detected energy derives therefrom a first electrical signal proportional to the energy reflected from the reflecting surface of said wafer,

    摘要翻译: 适用于测量具有辐射能量反射表面的半导体晶片的发射率的装置包括具有第一和第二间隔开的开口并具有能够分布辐射能的内表面的中空积分球。 晶片被布置成其反射表面邻近第二开口。 第一辐射能量检测器设置在球体的内表面上以检测分布的能量。 第一种方式是将一束辐射能通过球体中的第一个开口,使得光束通过球体并且第二个开口撞击晶片反射表面,并随后反射到球体中,反射的能量分布在 并且由所述第一检测器检测。 耦合到所述第一检测器并响应于其检测到的能量的第二装置从其导出与从所述晶片的反射表面反射的能量成比例的第一电信号,

    Pyrometer apparatus for use in rapid thermal processing of semiconductor
wafers
    12.
    发明授权
    Pyrometer apparatus for use in rapid thermal processing of semiconductor wafers 失效
    用于半导体晶片快速热处理的高温计装置

    公开(公告)号:US5308161A

    公开(公告)日:1994-05-03

    申请号:US16713

    申请日:1993-02-11

    申请人: Alexander Stein

    发明人: Alexander Stein

    CPC分类号: G01J5/602

    摘要: Pyrometer apparatus measures the temperature of a semiconductor wafer which when heated by radiation from a bank of lamps emits thermal radiation which includes radiation contained in a selected spectral band. The apparatus includes a reaction chamber supporting the wafer and disposed above the bank of lamps. A hollow envelope reflecting incident radiation and thermal radiation from the wafer surrounds and is spaced from the chamber and the bank of lamps. A portion of the reflected radiation and the thermal radiation passes upwardly through a first opening. A source of said incident radiation disposed adjacent a second opening produces radiation within said spectral band which enters said envelope and is reflected inside the envelope to illuminate a selected spot on the wafer hemispherically. The spot reflects a portion of the incident radiation upwardly through the first opening. A device disposed outside of said envelope adjacent and above the first opening in the path of the reflected portion of incident radiation and said upward portion of wafer thermal radiation and responds within said spectral band to both of said portions to produce a first electrical signal proportional to the said reflected portion of incident radiation and a second electrical signal proportional to said upward portion of wafer thermal radiation. Another device responds to the first and second electrical signals to calculate the temperature of the wafer.

    摘要翻译: 高温计装置测量半导体晶片的温度,当半导体晶片通过来自一排灯的辐射进行加热时,其辐射包含所选光谱带中包含的辐射的热辐射。 该装置包括支撑晶片并设置在灯组上方的反应室。 反射来自晶片的入射辐射和热辐射的中空外壳围绕并与腔室和灯组隔开。 反射辐射和热辐射的一部分向上通过第一开口。 设置在第二开口附近的所述入射辐射源产生在所述光谱带内的辐射,所述光谱带进入所述包络并在所述包络体内反射以半透半透照射所述晶片上的选定光斑。 该点将入射辐射的一部分向上穿过第一开口。 设置在所述外壳的外侧的装置,其位于入射辐射的反射部分的路径中的第一开口的上方和晶片热辐射的所述上部,并在所述光谱带内响应于两个所述部分,以产生与 入射辐射的所述反射部分和与晶片热辐射的所述向上部分成比例的第二电信号。 另一个装置响应第一和第二电信号以计算晶片的温度。

    Pyrometer measurements in the presence of intense ambient radiation
    13.
    发明授权
    Pyrometer measurements in the presence of intense ambient radiation 失效
    在强环境辐射的情况下进行高温计测量

    公开(公告)号:US4611930A

    公开(公告)日:1986-09-16

    申请号:US750160

    申请日:1985-07-01

    申请人: Alexander Stein

    发明人: Alexander Stein

    IPC分类号: G01J5/00 G01J5/06

    摘要: The invention teaches a method for measuring the temperature of remote hot samples in the presence of ambient radiation. A portion of the surface of the sample is treated to obtain a spectral emissivity different from the untreated surface. The spectral radiances of the treated and untreated surface portions are measured and the temperature calculated from these values and the known emissivities.

    摘要翻译: 本发明教导了一种用于在存在环境辐射的情况下测量远程热样品的温度的方法。 处理样品表面的一部分以获得不同于未处理表面的光谱发射率。 测量处理和未处理的表面部分的光谱辐射,并根据这些值和已知的发射率计算温度。

    Turbine bucket airfoil profile
    16.
    发明授权
    Turbine bucket airfoil profile 有权
    涡轮斗翼型材

    公开(公告)号:US08740570B2

    公开(公告)日:2014-06-03

    申请号:US13304734

    申请日:2011-11-28

    IPC分类号: F01D5/14

    CPC分类号: F01D5/141 F05D2250/74

    摘要: A turbine bucket is provided including a bucket airfoil having an airfoil shape, the bucket airfoil having a nominal profile substantially in accordance with Cartesian coordinate values of X, Y and Z set forth in Table 1 wherein the Cartesian coordinate values of X, Y and Z are non-dimensional values from 0% to 100% convertible to dimensional distances in inches by multiplying the Cartesian coordinate values of X, Y and Z by a height of the airfoil in inches, and wherein X and Y are distances in inches which, when connected by smooth continuing arcs, define airfoil profile sections at each distance Z, the airfoil profile sections at Z distances being joined smoothly with one another to form a complete airfoil shape.

    摘要翻译: 提供一种涡轮机桶,其包括具有翼型形状的铲斗翼型,铲斗翼型件具有基本上符合表1所示的X,Y和Z的笛卡尔坐标值的标称轮廓,其中X,Y和Z的笛卡尔坐标值 是通过将X,Y和Z的笛卡尔坐标值乘以翼型的高度(英寸),其中X和Y是以英寸为单位的距离,其中,当 通过平滑连续的弧连接,在每个距离Z处限定翼型轮廓部分,Z距离处的翼型轮廓部分彼此平滑地连接以形成完整的翼型形状。

    Sanitary functional unit
    17.
    发明授权
    Sanitary functional unit 有权
    卫生功能单位

    公开(公告)号:US08740112B2

    公开(公告)日:2014-06-03

    申请号:US13304797

    申请日:2011-11-28

    IPC分类号: E03C1/08

    摘要: A sanitary functional unit with a housing releasably fastened to the water outlet of a sanitary outlet fitting, the housing having an outflow-side housing end face with outflow openings. The outflow-side housing end face has at least one slot, opposing longitudinal sides of which form turning engagement surfaces or tool engagement surfaces for a turning tool that is releasably inserted into the slot, and the housing of the functional unit is rotatably held on the water outlet of the outlet fitting and/or the housing end face is mounted rotatably in the housing. Using the turning tool in the slot, a pivotably mounted housing end face in the housing can be easily aligned and/or the turning force required for fitting and removing a screw connection provided between the outer housing periphery and the inner fitting periphery can be conveniently transferred to the housing without requiring special turning tools.

    摘要翻译: 一种卫生功能单元,其具有可释放地紧固到卫生出口配件的出水口的壳体,所述壳体具有具有流出开口的流出侧壳体端面。 流出侧壳体端面具有至少一个狭槽,其相对的纵向侧面形成用于可释放地插入槽中的转动工具的转动接合表面或工具接合表面,并且功能单元的壳体可旋转地保持在 出口配件和/或壳体端面的出水口可旋转地安装在壳体中。 通过使用该槽中的车削工具,壳体中可枢转地安装的壳体端面可以容易地对准和/或用于装配和移除设置在外壳外周和内配件周边之间的螺纹连接所需的转动力可以方便地转移 而不需要特殊的车削工具。

    Jet regulator and sanitary water outlet
    18.
    发明授权
    Jet regulator and sanitary water outlet 有权
    射流调节器和卫生水出口

    公开(公告)号:US08651401B2

    公开(公告)日:2014-02-18

    申请号:US13025216

    申请日:2011-02-11

    IPC分类号: B05B1/14

    CPC分类号: E03C1/084 Y10T137/9464

    摘要: A jet regulator or jet aerator is provided with a jet regulator housing insertable into a water outlet and detachably held therein by threaded or bayonet connection. The jet regulator housing has an outflow-side housing partial region with a reduced housing outer circumference compared to the inflow-side housing partial region, and the outflow-side housing partial region is insertable into an insert opening of a turning tool such that the turning tool can be applied to a tool working surface in a rotationally fixed manner. The tool working surface is provided on the outflow-side frontal edge, the housing circumference of the outflow-side housing partial region and/or an annular shoulder surrounding the housing partial region on the outside. A sanitary water outlet is also provided, which for a plurality of visibly separately emerging water jets has a corresponding plurality of water outflows spaced apart from one another.

    摘要翻译: 喷射调节器或射流曝气器设置有可插入出水口并通过螺纹或卡口连接可拆卸地保持在其中的喷射调节器壳体。 喷射调节器壳体具有与流入侧壳体部分区域相比具有减小的壳体外周的流出侧壳体部分区域,并且流出侧壳体部分区域可插入到车削工具的插入开口中,使得车削 工具可以以旋转固定的方式施加到工具工作表面。 工具工作面设置在流出侧前端边缘,流出侧壳体部分区域的壳体周边和/或围绕外部的壳体部分区域的环形肩部。 还提供了一种卫生水出口,对于多个明显分开的出水喷嘴具有彼此间隔开的相应的多个水流出物。

    Sanitary water outlet
    19.
    发明授权
    Sanitary water outlet 有权
    卫生水出口

    公开(公告)号:US08528840B2

    公开(公告)日:2013-09-10

    申请号:US13475712

    申请日:2012-05-18

    IPC分类号: E03C1/08 B05B15/08 B05B1/14

    CPC分类号: E03C1/08 E03C2001/082

    摘要: A sanitary insert (1) includes a housing (8) and a flow guide (4), the housing (8) having a generally cylindrical shape and an inner wall portion thereof has a concavity (3) around its periphery. The flow guide (4) having generally a disc shape with an outer wall portion thereof having a convexity (2), the housing (8) being configured to pivotally secure the flow guide (4) within it by a ball and socket type engagement thereby allowing an articulating movement of the flow guide (4) within the housing (8). The housing (8) being configured to be inserted into a plumbing outflow fitting.

    摘要翻译: 卫生用插入件(1)包括壳体(8)和流动引导件(4),所述壳体(8)具有大致圆筒形状,并且其内壁部分在其周边具有凹部(3)。 所述流动导向件(4)具有大致圆盘形状,其外壁部分具有凸度(2),所述壳体(8)构造成通过球窝型接合将所述流动引导件(4)可枢转地固定在其内, 允许流动引导件(4)在壳体(8)内的铰接运动。 壳体(8)构造成插入管道流出配件中。

    SANITARY FUNCTIONAL UNIT
    20.
    发明申请
    SANITARY FUNCTIONAL UNIT 有权
    卫生功能单位

    公开(公告)号:US20130134239A1

    公开(公告)日:2013-05-30

    申请号:US13304797

    申请日:2011-11-28

    IPC分类号: B05B1/00

    摘要: A sanitary functional unit with a housing releasably fastened to the water outlet of a sanitary outlet fitting, the housing having an outflow-side housing end face with outflow openings. The outflow-side housing end face has at least one slot, opposing longitudinal sides of which form turning engagement surfaces or tool engagement surfaces for a turning tool that is releasably inserted into the slot, and the housing of the functional unit is rotatably held on the water outlet of the outlet fitting and/or the housing end face is mounted rotatably in the housing. Using the turning tool in the slot, a pivotably mounted housing end face in the housing can be easily aligned and/or the turning force required for fitting and removing a screw connection provided between the outer housing periphery and the inner fitting periphery can be conveniently transferred to the housing without requiring special turning tools.

    摘要翻译: 一种卫生功能单元,其具有可释放地紧固到卫生出口配件的出水口的壳体,所述壳体具有具有流出开口的流出侧壳体端面。 流出侧壳体端面具有至少一个狭槽,其相对的纵向侧面形成用于可释放地插入槽中的转动工具的转动接合表面或工具接合表面,并且功能单元的壳体可旋转地保持在 出口配件和/或壳体端面的出水口可旋转地安装在壳体中。 通过使用该槽中的车削工具,壳体中可枢转地安装的壳体端面可以容易地对准和/或用于装配和移除设置在外壳外周和内配件周边之间的螺纹连接所需的转动力可以方便地转移 而不需要特殊的车削工具。