摘要:
Apparatus adapted for use in measuring emissivity of a semiconductor wafer having a radiant energy reflecting surface includes a hollow integrating sphere having first and second spaced apart openings and having an inner surface upon which radiant energy can be distributed. The wafer is disposed with its reflecting surface adjacent the second opening. A first radiant energy detector is disposed on the inner surface of the sphere to detect the distributed energy. First means directs a beam of radiant energy through the first opening in the sphere in such manner that the beam passes through the sphere and the second opening to strike the wafer reflecting surface and is thereupon reflected into the sphere, the reflected energy being distributed upon the inner surface of the sphere and being detected by said first detector. Second means coupled to said first detector and responsive to its detected energy derives therefrom a first electrical signal proportional to the energy reflected from the reflecting surface of said wafer,
摘要:
Pyrometer apparatus measures the temperature of a semiconductor wafer which when heated by radiation from a bank of lamps emits thermal radiation which includes radiation contained in a selected spectral band. The apparatus includes a reaction chamber supporting the wafer and disposed above the bank of lamps. A hollow envelope reflecting incident radiation and thermal radiation from the wafer surrounds and is spaced from the chamber and the bank of lamps. A portion of the reflected radiation and the thermal radiation passes upwardly through a first opening. A source of said incident radiation disposed adjacent a second opening produces radiation within said spectral band which enters said envelope and is reflected inside the envelope to illuminate a selected spot on the wafer hemispherically. The spot reflects a portion of the incident radiation upwardly through the first opening. A device disposed outside of said envelope adjacent and above the first opening in the path of the reflected portion of incident radiation and said upward portion of wafer thermal radiation and responds within said spectral band to both of said portions to produce a first electrical signal proportional to the said reflected portion of incident radiation and a second electrical signal proportional to said upward portion of wafer thermal radiation. Another device responds to the first and second electrical signals to calculate the temperature of the wafer.
摘要:
The invention teaches a method for measuring the temperature of remote hot samples in the presence of ambient radiation. A portion of the surface of the sample is treated to obtain a spectral emissivity different from the untreated surface. The spectral radiances of the treated and untreated surface portions are measured and the temperature calculated from these values and the known emissivities.
摘要:
A device is disclosed for producing intense 16 micron radiation in which stimulated rotational Raman scattering takes place in parahydrogen on an off-axis path between a pair of spherical mirrors.
摘要:
The invention relates to a sanitary insert part (1) having an insert housing (2), which (2) includes in a housing interior thereof a functional element (3) that controls throughflow and that has at least one throughflow orifice (4). The insert part according to the invention is characterized in that at least one throughflow opening (4) is delimited by a peripheral wall, the shape of which can be changed against a restoring force as a result of the pressure of the inflowing water in such a manner that the at least one throughflow orifice (4) has a variable orifice cross section which can be changed, in dependence on the pressure of the inflowing water, between an open position and a minimized position having a reduced orifice cross section by comparison.
摘要:
A turbine bucket is provided including a bucket airfoil having an airfoil shape, the bucket airfoil having a nominal profile substantially in accordance with Cartesian coordinate values of X, Y and Z set forth in Table 1 wherein the Cartesian coordinate values of X, Y and Z are non-dimensional values from 0% to 100% convertible to dimensional distances in inches by multiplying the Cartesian coordinate values of X, Y and Z by a height of the airfoil in inches, and wherein X and Y are distances in inches which, when connected by smooth continuing arcs, define airfoil profile sections at each distance Z, the airfoil profile sections at Z distances being joined smoothly with one another to form a complete airfoil shape.
摘要:
A sanitary functional unit with a housing releasably fastened to the water outlet of a sanitary outlet fitting, the housing having an outflow-side housing end face with outflow openings. The outflow-side housing end face has at least one slot, opposing longitudinal sides of which form turning engagement surfaces or tool engagement surfaces for a turning tool that is releasably inserted into the slot, and the housing of the functional unit is rotatably held on the water outlet of the outlet fitting and/or the housing end face is mounted rotatably in the housing. Using the turning tool in the slot, a pivotably mounted housing end face in the housing can be easily aligned and/or the turning force required for fitting and removing a screw connection provided between the outer housing periphery and the inner fitting periphery can be conveniently transferred to the housing without requiring special turning tools.
摘要:
A jet regulator or jet aerator is provided with a jet regulator housing insertable into a water outlet and detachably held therein by threaded or bayonet connection. The jet regulator housing has an outflow-side housing partial region with a reduced housing outer circumference compared to the inflow-side housing partial region, and the outflow-side housing partial region is insertable into an insert opening of a turning tool such that the turning tool can be applied to a tool working surface in a rotationally fixed manner. The tool working surface is provided on the outflow-side frontal edge, the housing circumference of the outflow-side housing partial region and/or an annular shoulder surrounding the housing partial region on the outside. A sanitary water outlet is also provided, which for a plurality of visibly separately emerging water jets has a corresponding plurality of water outflows spaced apart from one another.
摘要:
A sanitary insert (1) includes a housing (8) and a flow guide (4), the housing (8) having a generally cylindrical shape and an inner wall portion thereof has a concavity (3) around its periphery. The flow guide (4) having generally a disc shape with an outer wall portion thereof having a convexity (2), the housing (8) being configured to pivotally secure the flow guide (4) within it by a ball and socket type engagement thereby allowing an articulating movement of the flow guide (4) within the housing (8). The housing (8) being configured to be inserted into a plumbing outflow fitting.
摘要:
A sanitary functional unit with a housing releasably fastened to the water outlet of a sanitary outlet fitting, the housing having an outflow-side housing end face with outflow openings. The outflow-side housing end face has at least one slot, opposing longitudinal sides of which form turning engagement surfaces or tool engagement surfaces for a turning tool that is releasably inserted into the slot, and the housing of the functional unit is rotatably held on the water outlet of the outlet fitting and/or the housing end face is mounted rotatably in the housing. Using the turning tool in the slot, a pivotably mounted housing end face in the housing can be easily aligned and/or the turning force required for fitting and removing a screw connection provided between the outer housing periphery and the inner fitting periphery can be conveniently transferred to the housing without requiring special turning tools.