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公开(公告)号:US07324251B2
公开(公告)日:2008-01-29
申请号:US11101519
申请日:2005-04-08
申请人: Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
发明人: Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
CPC分类号: G02B26/0841 , G02B26/085 , H02N1/008
摘要: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.
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公开(公告)号:US07145712B2
公开(公告)日:2006-12-05
申请号:US10962445
申请日:2004-10-13
申请人: Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
发明人: Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
IPC分类号: G02B26/00
CPC分类号: G02B26/0841 , B81B2201/045 , B81B2203/0136 , B81C1/00182 , B81C2203/0109 , Y10S359/904
摘要: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
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公开(公告)号:US20050046980A1
公开(公告)日:2005-03-03
申请号:US10962445
申请日:2004-10-13
申请人: Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
发明人: Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
CPC分类号: G02B26/0841 , B81B2201/045 , B81B2203/0136 , B81C1/00182 , B81C2203/0109 , Y10S359/904
摘要: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
摘要翻译: 微镜单元包括承载镜部分的移动部分,框架和将移动部件连接到框架的扭杆。 移动部件,框架和扭杆从材料基板形成为一体。 框架包括比移动部分更厚的部分。
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公开(公告)号:US07751108B2
公开(公告)日:2010-07-06
申请号:US11987899
申请日:2007-12-05
申请人: Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
发明人: Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
CPC分类号: G02B26/0841 , G02B26/085 , H02N1/008
摘要: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.
摘要翻译: 微型致动元件(X1)包括可移动单元(111),框架(112)和用于连接它们的联接器(113),其中单元,框架和耦合器一体地形成在具有多个 由导电层(110a-110c)(例如芯导电层(110b))和介于导电层(110a-110c)之间的绝缘层(110d,110e)组成。 可移动单元(111)包括源于芯导电层(110b)的第一结构。 框架(112)包括源于芯导电层(110b)的第二结构。 耦合器(113)包括多个电分离的扭杆(113a,113b),其产生在芯导电层(110b)中并且连续地连接到第一结构和第二结构。
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公开(公告)号:US20080285108A1
公开(公告)日:2008-11-20
申请号:US11987899
申请日:2007-12-05
申请人: Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
发明人: Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
CPC分类号: G02B26/0841 , G02B26/085 , H02N1/008
摘要: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.
摘要翻译: 微致动元件(X 1)包括可移动单元(111),框架(112)和用于连接它们的耦合器(113),其中单元,框架和耦合器一体形成在具有 由导电层(110a-110c),例如芯导电层(110b)和介于导电层(110a-110c)之间的绝缘层(110d,110e))组成的多层结构, 。 可移动单元(111)包括源于芯导电层(110b)的第一结构。 框架(112)包括源于芯导电层(110b)的第二结构。 耦合器(113)包括多个电分离的扭力杆(113a,113b),其产生在芯导电层(110b)中并连续地连接到第一结构和第二结构。
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公开(公告)号:US06817725B2
公开(公告)日:2004-11-16
申请号:US10327855
申请日:2002-12-26
申请人: Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
发明人: Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
IPC分类号: G02B7182
CPC分类号: G02B26/0841 , B81B2201/045 , B81B2203/0136 , B81C1/00182 , B81C2203/0109 , Y10S359/904
摘要: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
摘要翻译: 微镜单元包括承载镜部分的移动部分,框架和将移动部件连接到框架的扭杆。 移动部件,框架和扭杆从材料基板形成为一体。 框架包括比移动部分更厚的部分。
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公开(公告)号:US07952033B2
公开(公告)日:2011-05-31
申请号:US12039186
申请日:2008-02-28
申请人: Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
发明人: Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
IPC分类号: H05K1/03
CPC分类号: B81C1/00698 , Y10T29/49117
摘要: A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.
摘要翻译: 微结构包括具有第一导体,第二导体和位于第一和第二导体之间的中间绝缘体的层压结构。 第一导体包括相对于第二导体的相对面,侧面和形成上述相对面和侧面的边界的边缘部分。 第二导体包括延伸超过超过第一导体的边缘部分的延伸面。 绝缘膜包括覆盖边缘部分的至少一部分和/或侧面的至少一部分的区域。
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公开(公告)号:US20100007940A1
公开(公告)日:2010-01-14
申请号:US12484456
申请日:2009-06-15
申请人: Osamu Tsuboi , Norinao Kouma , Yoshihiro Mizuno , Hiromitsu Soneda , Hisao Okuda , Tsuyoshi Matsumoto
发明人: Osamu Tsuboi , Norinao Kouma , Yoshihiro Mizuno , Hiromitsu Soneda , Hisao Okuda , Tsuyoshi Matsumoto
IPC分类号: G02B26/08
CPC分类号: G02B26/0841
摘要: A micro oscillating device includes a first frame; an oscillating portion; a first twist coupling portion and a second twist coupling portion coupling the first frame and the oscillating portion to define a first shaft center of an oscillating operation of the oscillating portion; a second frame including a support base and an arm portion extended from the support base toward the oscillating portion; and a third twist coupling portion and a fourth twist coupling portion coupling the second frame and the first frame to define a second shaft center of an oscillating operation of the first frame, wherein the third twist coupling portion is coupled to the first frame and the arm portion between the oscillating portion and the support base, and the fourth twist coupling portion is coupled to the first frame and the support base or the arm portion between the oscillating portion and the support base.
摘要翻译: 微振荡装置包括:第一框架; 振荡部分; 第一扭转联接部分和第二扭转联接部分,其联接所述第一框架和所述振荡部分,以限定所述振荡部分的振荡操作的第一轴心; 第二框架,包括支撑基座和从支撑基部向振荡部分延伸的臂部分; 以及第三扭转联接部分和第四扭转联接部分,其联接所述第二框架和所述第一框架以限定所述第一框架的振荡操作的第二轴心,其中所述第三扭转联接部分联接到所述第一框架和所述臂 所述摆动部分与所述支撑基座之间的部分,所述第四扭转联接部分在所述振荡部分和所述支撑基座之间联接到所述第一框架和所述支撑基座或所述臂部分。
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公开(公告)号:US07903315B2
公开(公告)日:2011-03-08
申请号:US12484456
申请日:2009-06-15
申请人: Osamu Tsuboi , Norinao Kouma , Yoshihiro Mizuno , Hiromitsu Soneda , Hisao Okuda , Tsuyoshi Matsumoto
发明人: Osamu Tsuboi , Norinao Kouma , Yoshihiro Mizuno , Hiromitsu Soneda , Hisao Okuda , Tsuyoshi Matsumoto
IPC分类号: G02B26/00
CPC分类号: G02B26/0841
摘要: A micro oscillating device includes a first frame; an oscillating portion; a first twist coupling portion and a second twist coupling portion coupling the first frame and the oscillating portion to define a first shaft center of an oscillating operation of the oscillating portion; a second frame including a support base and an arm portion extended from the support base toward the oscillating portion; and a third twist coupling portion and a fourth twist coupling portion coupling the second frame and the first frame to define a second shaft center of an oscillating operation of the first frame, wherein the third twist coupling portion is coupled to the first frame and the arm portion between the oscillating portion and the support base, and the fourth twist coupling portion is coupled to the first frame and the support base or the arm portion between the oscillating portion and the support base.
摘要翻译: 微振荡装置包括:第一框架; 振荡部分; 第一扭转联接部分和第二扭转联接部分,其联接所述第一框架和所述振荡部分,以限定所述振荡部分的振荡操作的第一轴心; 第二框架,包括支撑基座和从支撑基部向振荡部分延伸的臂部分; 以及第三扭转联接部分和第四扭转联接部分,其联接所述第二框架和所述第一框架以限定所述第一框架的振荡操作的第二轴心,其中所述第三扭转联接部分联接到所述第一框架和所述臂 所述摆动部分与所述支撑基座之间的部分,所述第四扭转联接部分在所述振荡部分和所述支撑基座之间联接到所述第一框架和所述支撑基座或所述臂部分。
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公开(公告)号:US08471152B2
公开(公告)日:2013-06-25
申请号:US13091728
申请日:2011-04-21
申请人: Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
发明人: Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
IPC分类号: H05K1/03
CPC分类号: B81C1/00698 , Y10T29/49117
摘要: A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.
摘要翻译: 微结构包括具有第一导体,第二导体和位于第一和第二导体之间的中间绝缘体的层压结构。 第一导体包括相对于第二导体的相对面,侧面和形成上述相对面和侧面的边界的边缘部分。 第二导体包括延伸超过超过第一导体的边缘部分的延伸面。 绝缘膜包括覆盖边缘部分的至少一部分和/或侧面的至少一部分的区域。
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