DEVICE AND METHOD FOR PRODUCING HERMETICALLY-SEALED CAVITIES
    12.
    发明申请
    DEVICE AND METHOD FOR PRODUCING HERMETICALLY-SEALED CAVITIES 有权
    用于生产渗透密封的装置和方法

    公开(公告)号:US20150207101A1

    公开(公告)日:2015-07-23

    申请号:US14417169

    申请日:2013-07-18

    Abstract: An apparatus may include a first support covered with at least one ALD precursor and/or at least one MLD precursor, and a second support covered with at least one ALD precursor and/or at least one MLD precursor which is/are complementary to the ALD precursor and/or MLD precursor of the first support. The first support is at least partly joined to the second support by an atomic bond between the ALD precursor of the first support and the ALD precursor of the second support or between the MLD precursor of the first support and the MLD precursor of the second support in such a way that an ALD layer or an MLD layer is formed.

    Abstract translation: 装置可以包括覆盖有至少一个ALD前体和/或至少一个MLD前体的第一载体,以及用至少一个ALD前体覆盖的第二载体和/或与ALD互补的至少一个MLD前体 前体和/或第一支持物的MLD前体。 第一载体至少部分地通过第一载体的ALD前体与第二载体的ALD前体之间的原子键或第一载体的MLD前体与第二载体的MLD前体之间的原子键连接在第二载体上 这样形成ALD层或MLD层。

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