ACTIVE-PIXEL DEVICE ASSEMBLIES WITH ROUGH COATING FOR STRAY-LIGHT REDUCTION, AND METHODS FOR MANUFACTURE

    公开(公告)号:US20210356821A1

    公开(公告)日:2021-11-18

    申请号:US16875953

    申请日:2020-05-15

    Abstract: An active-pixel device assembly with stray-light reduction includes an active-pixel device including a semiconductor substrate and an array of active pixels, a light-transmissive substrate disposed on a light-receiving side of the active-pixel device, and a rough opaque coating disposed on a first surface of the light-transmissive substrate and forming an aperture aligned with the array of active pixels, wherein the rough opaque coating is rough so as to suppress reflection of light incident thereon from at least one side. A method for manufacturing a stray-light-reducing coating for an active-pixel device assembly includes depositing an opaque coating on a light-transmissive substrate such that the opaque coating forms a light-transmissive aperture, and roughening the opaque coating to form a rough opaque coating, said roughening including treating the opaque coating with an alkaline solution.

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