公开(公告)号：US20150349324A1

公开(公告)日：2015-12-03

申请号：US14820500

申请日：2015-08-06

Applicant: SAKTI3, INC.

Inventor： Myoungdo CHUNG ,  Hyoncheol KIM ,  Ann Marie SASTRY ,  Marc LANGLOIS

IPC: H01M4/04 ,  H01M4/1391 ,  H01M4/131

CPC classification number: C23C14/0031 ,  C23C14/0676 ,  C23C14/083 ,  C23C14/5833 ,  H01M2/145 ,  H01M4/0423 ,  H01M4/131 ,  H01M4/1391 ,  H01M4/382 ,  H01M4/48 ,  H01M4/483 ,  H01M4/5825 ,  H01M6/40 ,  H01M10/0562 ,  H01M10/0585 ,  H01M2004/028

Abstract: A method for manufacturing a solid-state battery device. The method can include providing a substrate within a process region of an apparatus. A cathode source and an anode source can be subjected to one or more energy sources to transfer thermal energy into a portion of the source materials to evaporate into a vapor phase. An ionic species from an ion source can be introduced and a thickness of solid-state battery materials can be formed overlying the surface region by interacting the gaseous species derived from the plurality of electrons and the ionic species. During formation of the thickness of the solid-state battery materials, the surface region can be maintained in a vacuum environment from about 10−6 to 10−4 Torr. Active materials comprising cathode, electrolyte, and anode with non-reactive species can be deposited for the formation of modified modulus layers, such a void or voided porous like materials.

Abstract translation: 一种固态电池装置的制造方法。 该方法可以包括在装置的工艺区域内提供衬底。 阴极源和阳极源可以经受一个或多个能量源以将热能转移到源材料的一部分中以蒸发成气相。 可以引入离子源的离子物质，并且可以通过与衍生自多个电子和离子物质的气态物质相互作用而在表面区域上形成固体电池材料的厚度。 在形成固体电池材料的厚度期间，可以将表面区域保持在大约10 -6至10 -4乇的真空环境中。 可以沉积包含阴极，电解质和具有非反应性物质的阳极的活性材料，以形成改性的模量层，例如空隙或空隙多孔的材料。