公开(公告)号：US20180083193A1

公开(公告)日：2018-03-22

申请号：US15701856

申请日：2017-09-12

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jongbum KIM ,  Sangmin YI ,  Daewon BAEK ,  Minchul SONG ,  Sangshin LEE ,  Seungjin LEE ,  Jiyun CHUN

IPC: H01L51/00 ,  H01L51/56

CPC classification number: H01L51/0011 ,  C23C14/042 ,  C23C14/12 ,  H01L21/00 ,  H01L21/67 ,  H01L51/0002 ,  H01L51/001 ,  H01L51/0014 ,  H01L51/56

Abstract: A method of manufacturing a division mask includes pulling opposite end portions of a mask member in a first direction to fasten the mask member to a fastening portion, forming a first pattern portion having a plurality of first openings on the fastened mask member, such that the first pattern portion has a longer length in the first direction toward a central portion of the first pattern portion, and cutting the opposite end portions of the mask member to detach the mask member from the fastening portion.

公开(公告)号：US20170369983A1

公开(公告)日：2017-12-28

申请号：US15630206

申请日：2017-06-22

Applicant: Samsung Display Co., Ltd.

Inventor： Sangmin YI

IPC: C23C14/04 ,  C23F1/00 ,  C23C14/18

CPC classification number: C23C14/042 ,  C23C14/185 ,  C23F1/00

Abstract: A mask assembly for thin film deposition and a method of manufacturing the same. The mask assembly includes a glass mask having a first surface and a second surface opposite the first surface, a first metal layer patterned above the first surface of the glass mask, and a second metal layer patterned below the second surface of the glass mask. A plurality of deposition areas are arranged on the glass mask, and a plurality of deposition pattern portions each having a plurality of slits are patterned in the plurality of deposition areas.