NANOPORE DEVICE INCLUDING GRAPHENE NANOPORE AND METHOD OF MANUFACTURING THE SAME
    12.
    发明申请
    NANOPORE DEVICE INCLUDING GRAPHENE NANOPORE AND METHOD OF MANUFACTURING THE SAME 有权
    包括石墨纳米片的纳米器件及其制造方法

    公开(公告)号:US20150069329A1

    公开(公告)日:2015-03-12

    申请号:US14257654

    申请日:2014-04-21

    CPC classification number: G01N33/48721 B81C1/00087

    Abstract: Provided are a nanopore device with resolution improved by graphene nanopores, and a method of manufacturing the same. The nanopore device includes: a first insulating layer; a graphene layer disposed on the first insulating layer and having a nanopore formed at a center portion of the graphene layer; and first and second electrode layers disposed respectively at both sides of the nanopore on a top surface of the graphene layer, wherein a center region of the first insulating layer is removed such that the center portion of the graphene layer is exposed to the outside.

    Abstract translation: 提供了具有通过石墨烯纳米孔改善的分辨率的纳米孔装置及其制造方法。 纳米孔装置包括:第一绝缘层; 设置在所述第一绝缘层上并且具有形成在所述石墨烯层的中心部分处的纳米孔的石墨烯层; 以及分别位于所述石墨烯层的顶表面上的所述纳米孔两侧的第一和第二电极层,其中去除所述第一绝缘层的中心区域,使得所述石墨烯层的中心部分暴露于外部。

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