公开(公告)号：US10757331B2

公开(公告)日：2020-08-25

申请号：US16437016

申请日：2019-06-11

Applicant: SEMES CO., LTD.

Inventor： Sungyong Chun ,  Ohyeol Kwon ,  Sung Wook Bae

IPC: H04N5/232 ,  H04N5/225 ,  H01L21/67

Abstract: A method for estimating a posture of a camera installed in a substrate processing apparatus to obliquely photograph an object includes removing the remaining background other than a substrate and performing ellipse fitting, adjusting a yaw direction of the camera by using a difference between the center of a camera image and the center of an elliptical substrate image obtained by performing the ellipse fitting, adjusting a roll direction of the camera by using a tilt angle of an ellipse in the elliptical substrate image obtained by performing the ellipse fitting, and adjusting a pitch direction of the camera by using a ratio of a minor axis to a major axis of the ellipse in the elliptical substrate image obtained by performing the ellipse fitting.