公开(公告)号：US20220344182A1

公开(公告)日：2022-10-27

申请号：US17860202

申请日：2022-07-08

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Toshihiro Kawai ,  Takashi Shigeta ,  Munekazu Komiya ,  Yasushi Taniyama

IPC: H01L21/67 ,  F24F13/28 ,  F24F7/06 ,  B01D53/04 ,  F24F7/00 ,  B65G49/07 ,  H01L21/677 ,  F24F3/167 ,  F24F7/08 ,  H01L21/673 ,  B01D53/40 ,  B01D53/42 ,  C12M1/12 ,  F24F6/00 ,  H01L21/687

Abstract: To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter.
The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

公开(公告)号：US20200312686A1

公开(公告)日：2020-10-01

申请号：US16845555

申请日：2020-04-10

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Toshihiro Kawai ,  Takashi Shigeta ,  Munekazu Komiya ,  Yasushi Taniyama

IPC: H01L21/67 ,  F24F13/28 ,  F24F7/06 ,  B01D53/04 ,  F24F7/00 ,  B65G49/07 ,  H01L21/677 ,  B01D53/40 ,  B01D53/42 ,  C12M1/12 ,  F24F6/00 ,  H01L21/687

Abstract: To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter.The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).