公开(公告)号：US20230168415A1

公开(公告)日：2023-06-01

申请号：US18058147

申请日：2022-11-22

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Federico VERCESI ,  Nicolo' BONI ,  Fabrizio CERINI ,  Luca GUERINONI

IPC: G02B5/00 ,  H02N1/00 ,  H02N2/02

CPC classification number: G02B5/005 ,  H02N1/006 ,  H02N2/028

Abstract: A MEMS shutter including: a semiconductor substrate traversed by an aperture; a first semiconductor layer and a second semiconductor layer, which form a supporting structure fixed to the substrate; a plurality of deformable structures, each of which is formed by a corresponding portion of at least one between the first and second semiconductor layers; a plurality of actuators; a plurality of shielding structures, each of which is formed by a corresponding portion of at least one between the first and second semiconductor layers, the shielding structures being arranged angularly around the underlying aperture so as to provide shielding of the aperture, each shielding structure being further coupled to the supporting structure via a deformable structure. Each actuator may be controlled so as to translate a corresponding shielding structure between a first position and a second position, thus varying shielding of the aperture; the first and second positions of the shielding structures are such that, in at least one operating condition, pairs of adjacent shielding structures at least partially overlap one another.