公开(公告)号：US20180031856A1

公开(公告)日：2018-02-01

申请号：US15659100

申请日：2017-07-25

申请人： TDK CORPORATION

发明人： Masahiro HOSOKAWA ,  Takuto HORII ,  Naoki YUSA

IPC分类号： G02B27/64 ,  H02N2/04 ,  H02N2/02 ,  G03B5/04

CPC分类号： G02B27/646 ,  G03B5/02 ,  G03B5/04 ,  G03B2205/0015 ,  G03B2205/0061 ,  H02N2/025 ,  H02N2/028 ,  H02N2/043

摘要： An X-axis movable object holding portion to hold an X-axis movable object is provided at a position facing an X-axis actuator in a base member. A Y-axis movable object holding portion to hold a Y-axis movable object is provided at a position facing a Y-axis actuator in the X-axis movable object. An X-axis stopper mechanism for restricting a movement range of the X-axis movable object is provided in the base member. A Y-axis stopper mechanism for restricting a movement range of the Y-axis movable object is provided in the X-axis movable object.

公开(公告)号：US20170365497A1

公开(公告)日：2017-12-21

申请号：US15596485

申请日：2017-05-16

申请人： Alan S. EDELSTEIN

发明人： Alan S. Edelstein ,  John M. Timmerwilke

IPC分类号： H01L21/68 ,  H01L23/00 ,  G01B11/27 ,  G01B21/24 ,  H01L21/66 ,  G01K7/02 ,  H01L25/00 ,  H01L25/065

CPC分类号： H01L21/681 ,  G01B11/272 ,  G01B21/24 ,  G01K7/02 ,  G01Q60/22 ,  G01Q80/00 ,  G05B19/402 ,  G05B2219/37387 ,  H01L22/20 ,  H01L24/16 ,  H01L24/81 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/81007 ,  H01L2224/81122 ,  H01L2224/8117 ,  H01L2224/8118 ,  H01L2224/81908 ,  H02N2/028

摘要： Method for positioning and orienting a first object relative to a second object. Method includes positioning a near field transducer having an aperture on the first object, and directing a laser light toward the aperture of the near field transducer on the first object to create an effervescent wave on the other side of the aperture. Positioning a sensor on the second object for detecting the effervescent wave from the near field transducer. Providing an algorithm, and using information obtained from the sensor on the second object in the algorithm to control a nanopositioning system to position one of the first and second objects in a desired position and orientation relative to the other one of the first and second objects. One or both of the first and second objects may be an interposer, such as a silicon or glass interposer.

公开(公告)号：US20170356930A1

公开(公告)日：2017-12-14

申请号：US15483719

申请日：2017-04-10

申请人： Alan S. Edelstein

发明人： Alan S. Edelstein ,  John M. Timmerwilke

IPC分类号： G01Q10/04 ,  H02N2/02 ,  G01Q10/06 ,  G03F7/20 ,  G03F9/00 ,  G05B19/23

CPC分类号： G01Q10/04 ,  G01Q10/065 ,  G01Q60/22 ,  G01Q80/00 ,  G03F7/70725 ,  G03F9/7003 ,  G05B19/231 ,  G05B19/402 ,  G05B2219/37387 ,  G05B2219/45029 ,  H02N2/028

摘要： Method for positioning and orienting a first object relative to a second object. The method includes positioning a near field transducer having an aperture on the first object, and directing a laser light toward the aperture of the near field transducer on the first object to create an effervescent wave on the other side of the aperture. Positioning a sensor on the second object for detecting the effervescent wave from the near field transducer. Providing an algorithm, and using information obtained from the sensor on the second object in the algorithm to control a nanopositioning system to position one of the first object and the second object in a desired position and orientation relative to the other one of the first object and the second object.

公开(公告)号：US09777793B1

公开(公告)日：2017-10-03

申请号：US15349670

申请日：2016-11-11

申请人： HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

发明人： Xuedong Chen ,  Min Wang ,  Yixiu Sun ,  Xiaoqing Li

IPC分类号： G05B19/402 ,  F16F15/00 ,  F16M11/22 ,  F16F15/06 ,  H02N2/00

CPC分类号： F16F15/002 ,  F16F15/06 ,  F16M11/22 ,  G05B19/402 ,  G05B2219/37351 ,  G05B2219/39241 ,  H02N2/001 ,  H02N2/028 ,  H02N2/043

摘要： A six-degree-of-freedom micro vibration suppression platform includes a basic platform, a load platform, six sets of single-degree-of-freedom active and passive composite vibration isolation devices that are exactly the same and a controller. Upper and lower ends of each set of single-degree-of-freedom active and passive composite vibration isolation devices are connected with the load platform and the basic platform, respectively. A control method includes: calculating a logical axis signal, calculating a logical axis control signal, calculating physical axis real-time control signals and a transfer step.

公开(公告)号：US09527733B2

公开(公告)日：2016-12-27

申请号：US14535611

申请日：2014-11-07

申请人： The Chinese University of Hong Kong

发明人： Shih-Chi Chen ,  Chenglin Li ,  Ji Wang

IPC分类号： H01L41/09 ,  B82Y40/00 ,  H02N2/00 ,  H02N2/02

CPC分类号： B82Y40/00 ,  H02N2/0095 ,  H02N2/028

摘要： A compliant apparatus for nano-manufacture, including a stage for supporting the objects to be nano-manufactured. The stage includes at least one flexural beam and at least one actuator coupled to the flexural beam; and the actuator is configured to generate and apply axial loads onto the flexural beam, such that a natural frequency of the flexural beam is shifted in response to the generated axial loads, so as to allow trade-offs between the natural frequency and a stroke of the stage for nano-manufacturing the objects.

摘要翻译： 一种用于纳米制造的兼容装置，包括用于支撑要纳米制造的物体的台。 舞台包括至少一个弯曲梁和耦合到弯曲梁的至少一个致动器; 并且所述致动器被配置为产生并施加轴向负载到所述弯曲梁上，使得所述弯曲梁的固有频率响应于所产生的轴向载荷而偏移，以便允许所述自然频率和行程之间的权衡 纳米制造阶段的对象。

公开(公告)号：US09172313B2

公开(公告)日：2015-10-27

申请号：US13818057

申请日：2011-08-10

申请人： Kaishi Ohashi ,  Hiroyuki Seki ,  Takayuki Tsukimoto ,  Shinji Yamamoto

发明人： Kaishi Ohashi ,  Hiroyuki Seki ,  Takayuki Tsukimoto ,  Shinji Yamamoto

IPC分类号： H02N2/00 ,  G02B27/64 ,  G03B5/00 ,  H02N2/02 ,  H04N5/225 ,  H04N5/232

CPC分类号： H02N2/001 ,  G02B27/646 ,  G03B5/00 ,  G03B2205/0015 ,  G03B2205/0061 ,  H02N2/0015 ,  H02N2/026 ,  H02N2/028 ,  H04N5/2254 ,  H04N5/23258 ,  H04N5/2328

摘要： An oscillatory wave drive unit includes at least one vibrator having an electromechanical energy converting element, and at least one supporting member configured to support the at least one vibrator. The oscillatory wave drive unit excites oscillation in the at least one vibrator and moves a moving body in contact with the at least one vibrator by frictional force. The oscillatory wave drive unit includes at least one moving mechanism configured to support the at least one vibrator movably in a plane parallel to the plane where the at least one vibrator and the moving body are in contact with each other, in a second direction intersecting with a first direction in which the at least one vibrator drives the moving body.

摘要翻译： 振荡波驱动单元包括至少一个具有机电能量转换元件的振动器，以及配置成支撑至少一个振动器的至少一个支撑构件。 振荡波驱动单元激励至少一个振动器的振荡，并通过摩擦力使与至少一个振动器接触的移动体移动。 所述振荡波驱动单元包括至少一个移动机构，所述至少一个移动机构构造成在与所述至少一个振动器和所述移动体彼此接触的平面平行的平面中可移动地支撑所述至少一个振动器， 所述至少一个振动器驱动所述移动体的第一方向。

公开(公告)号：US09110388B2

公开(公告)日：2015-08-18

申请号：US13589313

申请日：2012-08-20

申请人： Sascha Bleidistel ,  Bernhard Geuppert

发明人： Sascha Bleidistel ,  Bernhard Geuppert

IPC分类号： G02B7/02 ,  G03F7/20 ,  H01L41/09 ,  H02N2/00 ,  H02N2/02

CPC分类号： G03F7/70833 ,  G02B7/023 ,  G03F7/70258 ,  G03F7/70825 ,  H01L41/0913 ,  H02N2/0095 ,  H02N2/021 ,  H02N2/028

摘要： The disclosure relates to a projection exposure apparatus and an optical system, such as a projection objective or an illumination system in a projection exposure apparatus for microlithography, that includes at least one optical element and at least one manipulator having a drive device for the optical element. The drive device can have at least one movable partial element and at least one stationary partial element movable relative to one another in at least one direction of movement.

摘要翻译： 本发明涉及投影曝光装置和光学系统，例如用于微光刻的投影曝光装置中的投影物镜或照明系统，其包括至少一个光学元件和至少一个具有用于光学元件的驱动装置的操纵器 。 驱动装置可以具有至少一个可移动部分元件和至少一个可在至少一个运动方向上相对于彼此移动的固定部分元件。

公开(公告)号：US20140074297A1

公开(公告)日：2014-03-13

申请号：US14017269

申请日：2013-09-03

申请人： CANON KABUSHIKI KAISHA

发明人： Jun Sumioka

IPC分类号： G05B15/02

CPC分类号： G05B15/02 ,  G02B21/26 ,  H02N2/0015 ,  H02N2/0075 ,  H02N2/0095 ,  H02N2/028

摘要： Provided is a vibration type driving device enabling multidirectional driving of a moving body while considering a difference in transfer characteristics of the synthesized driving force of a plurality of motors between at least two mutually crossing directions.

摘要翻译： 提供一种振动型驱动装置，其能够考虑到至少两个相互交叉的方向之间的多个电动机的合成驱动力的传递特性的差异，能够进行移动体的多方向驱动。

公开(公告)号：US20130210294A1

公开(公告)日：2013-08-15

申请号：US13530723

申请日：2012-06-22

申请人： Sung Hoon AHN ,  Hyung Jung KIM ,  Sung Hyuk SONG ,  Min Woo HAN ,  Gil Yong LEE

发明人： Sung Hoon AHN ,  Hyung Jung KIM ,  Sung Hyuk SONG ,  Min Woo HAN ,  Gil Yong LEE

IPC分类号： B63H1/32 ,  B63G8/08

CPC分类号： B63G8/08 ,  B63B2035/007 ,  B63B2231/28 ,  B63G2008/002 ,  B63G2008/004 ,  B63H1/32 ,  B63H1/36 ,  H02N2/028

摘要： Disclosed is an underwater robot based on flapping comprising: an actuator including a smart material and directional material, wherein the smart material is changed in its shape according to an external signal, and the directional material restricts a deformation in a specific direction; a body connected with the actuator; and a controller which makes the actuator perform a first stroke in a direction, and a second stroke in another direction being different from that of the first stroke; wherein the actuator performs at least one deformation of bending and twisting according to position of the smart material and directionality of the directional material, and furthermore enables to simultaneously perform the smooth bending and twisting motion with the simple structure by adjusting the position of the smart material functioning as the active component, and the directionality of the directional material functioning as the passive component.

摘要翻译： 本发明涉及一种基于拍打的水下机器人，其特征在于包括：具有智能材料和方向材料的致动器，其中所述智能材料根据外部信号改变其形状，并且所述方向材料限制特定方向的变形; 与致动器连接的主体; 以及控制器，其使得所述致动器沿另一方向执行与所述第一冲程不同的方向的第一冲程; 其中致动器根据智能材料的位置和定向材料的方向性执行弯曲和扭转的至少一个变形，此外，通过调整智能材料的位置，能够以简单的结构同时进行平滑的弯曲和扭曲运动 作为有源元件，定向材料的方向性作为被动元件。

公开(公告)号：US08269841B2

公开(公告)日：2012-09-18

申请号：US12923010

申请日：2010-08-30

申请人： Tomoya Takei

发明人： Tomoya Takei

IPC分类号： H04N5/228

CPC分类号： H02N2/025 ,  G02B7/08 ,  H02N2/007 ,  H02N2/028 ,  H04N5/2254

摘要： An optical element driving device includes an optical element holder, first and second magnets, first and second magnetic bodies each having a cross section including a vertex and first and second legs forming an opening therebetween, first and second piezoelectric elements that move the optical element holder in directions perpendicular to each other by slidingly moving the first and second magnetic bodies by vibrating the first and second magnets, and first and second magnetic sensors that detect a position of the optical element holder, wherein the first and second piezoelectric elements are driven in a state in which the first and second magnets are coupled to the first and second legs from the opening side, wherein the first and second magnets are each magnetized in directions perpendicular to a magnetization line, and wherein the second magnetic sensor is disposed at a position that is not on the magnetization line.

摘要翻译： 一种光学元件驱动装置，包括光学元件保持器，第一和第二磁体，每个具有包括顶点的横截面的第一和第二磁体以及在其间形成开口的第一和第二支脚，第一和第二压电元件，其使光学元件支架 通过使第一和第二磁体振动来使第一和第二磁体滑动移动，以及检测光学元件保持器的位置的第一和第二磁性传感器彼此垂直的方向，其中第一和第二压电元件被驱动在 其中第一和第二磁体从开口侧联接到第一和第二腿，其中第一和第二磁体各自在垂直于磁化线的方向上磁化，并且其中第二磁性传感器设置在 不在磁化线上。