公开(公告)号：US20200235251A1

公开(公告)日：2020-07-23

申请号：US16744865

申请日：2020-01-16

Applicant: STMicroelectronics S.r.l.

Inventor： Luca SEGHIZZI ,  Linda MONTAGNA ,  Giuseppe VISALLI ,  Mikel AZPEITIA URQUIA

IPC: H01L31/0232 ,  G02B26/08 ,  H01L31/0203 ,  H01L31/113 ,  H01L31/02 ,  H02N1/00

Abstract: A first wafer of semiconductor material has a surface. A second wafer of semiconductor material includes a substrate and a structural layer on the substrate. The structural layer integrates a detector device for detecting electromagnetic radiation. The structural layer of the second wafer is coupled to the surface of the first wafer. The substrate of the second wafer is shaped to form a stator, a rotor, and a mobile mass of a micromirror. The stator and the rotor form an assembly for capacitively driving the mobile mass.