公开(公告)号：US11696486B2

公开(公告)日：2023-07-04

申请号：US17067730

申请日：2020-10-11

Applicant: Samsung Display Co., LTD.

Inventor： Jinoh Kwag ,  Sungsoon Im ,  Youngmin Moon ,  Ji-Hee Son ,  Seungyong Song ,  DuckJung Lee ,  Hye Yong Chu

IPC: H01L51/56 ,  C23C14/04 ,  H01L51/00 ,  H01L27/32 ,  H10K71/00 ,  H10K59/121 ,  H10K71/16

CPC classification number: H10K71/00 ,  C23C14/042 ,  H10K59/121 ,  H10K71/166

Abstract: Provided is a mask having a plurality of cell areas, each of which has a plurality of through-portions defined therein. The mask includes a mask film including a polymer and a conductive layer disposed on at least one surface of the mask film and including conductive metal or a conductive metal oxide. Accordingly, precision of a deposition process is enhanced while reducing process time and costs in a manufacturing process of the mask, and thus the yield in manufacturing a display panel using the mask is improved. Therefore, the display panel manufactured using the mask may have improved reliability.