公开(公告)号：US09010155B2

公开(公告)日：2015-04-21

申请号：US13889152

申请日：2013-05-07

Applicant: Samsung Display Co., Ltd.

Inventor： Cheol-Ho Park ,  Byoung-Kwon Choo ,  Eun-Cheol Kim ,  Hee-Geun Son ,  Jong-Hyun Yun

IPC: C01B33/02 ,  C01B33/021 ,  B23K26/12 ,  B23K26/30

CPC classification number: C01B33/021 ,  B23K26/128 ,  B23K26/704

Abstract: A laser annealing apparatus includes a lens unit configured to transmit a laser beam to be irradiated onto an irradiation target; a lens unit housing accommodating the lens unit and having an opening configured to allow the laser beam to pass through the opening; a blocking plate configured to block at least a portion of the laser beam reflected by the irradiation target after being transmitted through the lens unit to the irradiation target; and a cooling unit between the blocking plate and the lens unit housing.

Abstract translation: 激光退火装置包括：透镜单元，被配置为将要照射的激光束透射到照射目标上; 容纳透镜单元并具有允许激光束穿过开口的开口的透镜单元壳体; 阻挡板，被配置为在被透射到所述照射目标之后，阻挡由所述照射目标物反射的所述激光束的至少一部分; 以及在所述阻挡板和所述透镜单元壳体之间的冷却单元。