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公开(公告)号：US09010155B2
公开(公告)日：2015-04-21
申请号：US13889152
申请日：2013-05-07
发明人： Cheol-Ho Park , Byoung-Kwon Choo , Eun-Cheol Kim , Hee-Geun Son , Jong-Hyun Yun
IPC分类号： C01B33/02 , C01B33/021 , B23K26/12 , B23K26/30
CPC分类号： C01B33/021 , B23K26/128 , B23K26/704
摘要： A laser annealing apparatus includes a lens unit configured to transmit a laser beam to be irradiated onto an irradiation target; a lens unit housing accommodating the lens unit and having an opening configured to allow the laser beam to pass through the opening; a blocking plate configured to block at least a portion of the laser beam reflected by the irradiation target after being transmitted through the lens unit to the irradiation target; and a cooling unit between the blocking plate and the lens unit housing.
摘要翻译： 激光退火装置包括：透镜单元，被配置为将要照射的激光束透射到照射目标上; 容纳透镜单元并具有允许激光束穿过开口的开口的透镜单元壳体; 阻挡板，被配置为在被透射到所述照射目标之后，阻挡由所述照射目标物反射的所述激光束的至少一部分; 以及在所述阻挡板和所述透镜单元壳体之间的冷却单元。
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公开(公告)号：US20140202213A1
公开(公告)日：2014-07-24
申请号：US13889152
申请日：2013-05-07
发明人： Cheol-Ho Park , Byoung-Kwon Choo , Eun-Cheol Kim , Hee-Geun Son , Jong-Hyun Yun
IPC分类号： C01B33/02
CPC分类号： C01B33/021 , B23K26/128 , B23K26/704
摘要： A laser annealing apparatus includes a lens unit configured to transmit a laser beam to be irradiated onto an irradiation target; a lens unit housing accommodating the lens unit and having an opening configured to allow the laser beam to pass through the opening; a blocking plate configured to block at least a portion of the laser beam reflected by the irradiation target after being transmitted through the lens unit to the irradiation target; and a cooling unit between the blocking plate and the lens unit housing.
摘要翻译： 激光退火装置包括：透镜单元，被配置为将要照射的激光束透射到照射目标上; 容纳透镜单元并具有允许激光束穿过开口的开口的透镜单元壳体; 阻挡板，被配置为在被透射到所述照射目标之后，阻挡由所述照射目标物反射的所述激光束的至少一部分; 以及在所述阻挡板和所述透镜单元壳体之间的冷却单元。
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