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公开(公告)号:US20170365716A1
公开(公告)日:2017-12-21
申请号:US15694150
申请日:2017-09-01
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jae-Yup Chung , Hee-Soo Kang , Hee-Don Jeong , Se-Wan Park
IPC: H01L29/78 , H01L27/088
CPC classification number: H01L29/7848 , H01L27/0886 , H01L29/785
Abstract: A semiconductor device includes a first multi-channel active pattern, a field insulation layer disposed on the first multi-channel active pattern and including a first region and a second region, the first region having a top surface protruding from a top surface of the second region to a top surface of the first multi-channel active pattern, a first gate electrode crossing the first multi-channel active pattern, the first gate electrode being disposed on the field insulation layer, and a first source or drain disposed between the first gate electrode and the first region of the field insulation layer and including a first facet, the first facet being disposed adjacent to the first region of the field insulation layer at a point lower than the top surface of the first multi-channel active pattern.