公开(公告)号：US06190037B1

公开(公告)日：2001-02-20

申请号：US09253220

申请日：1999-02-19

申请人： Ashok Das ,  Nety Krishna ,  Marc Schweitzer ,  Nalin Patadia ,  Wei Yang ,  Umesh Kelkar ,  Vijay Parkhe ,  Scot Petitt ,  Nitin Khurana

发明人： Ashok Das ,  Nety Krishna ,  Marc Schweitzer ,  Nalin Patadia ,  Wei Yang ,  Umesh Kelkar ,  Vijay Parkhe ,  Scot Petitt ,  Nitin Khurana

IPC分类号： G01J500

CPC分类号： G01J5/041 ,  G01J5/0022

摘要： The present invention provides an apparatus and method for measuring the temperature of a moving radiant object. A probe, such as a pyrometer, is disposed in an opening of a vacuum chamber adjacent a radiation transparent window. The probe defines an optical path which intercepts the radiant object entering or exiting a processing chamber. The radiant object is moved through the optical path and emits electromagnetic waves. The electromagnetic waves are collected by the probe and transmitted to a signal processing unit where the waves are detected and converted to a temperature reading. If desired, the accumulated data may then be used to generate a cooling curve representing the thermal effects experienced by the radiant object. Extrapolation or correlation methods may be used to extend the cooling curve to points in time prior to or after the data collected by the probe.

摘要翻译： 本发明提供了一种用于测量运动辐射物体的温度的装置和方法。 诸如高温计的探针设置在与辐射透明窗相邻的真空室的开口中。 探针限定了拦截进入或离开处理室的辐射物体的光路。 辐射物体通过光路移动并发射电磁波。 电磁波由探头收集并传输到信号处理单元，在该信号处理单元检测波并将其转换为温度读数。 如果需要，则可以使用累积的数据来产生表示辐射物体经历的热效应的冷却曲线。 可以使用外推法或相关方法将冷却曲线延伸到由探针收集的数据之前或之后的时间点。