Cantilever with pivoting actuation
    13.
    发明授权
    Cantilever with pivoting actuation 失效
    悬臂与枢转致动

    公开(公告)号:US08205268B2

    公开(公告)日:2012-06-19

    申请号:US12323388

    申请日:2008-11-25

    IPC分类号: G01Q60/24

    摘要: Improved actuation device useful in direct-write nanolithography and imaging including use of a pivot point for downward deflection of a cantilever with long travel path. A device comprising at least one holder, at least one cantilever, an extension of the said cantilever wherein the extension is integrated with an actuator, wherein the cantilever is adapted for actuated movement. The actuator can be electrostatic, thermal, or piezoelectric. The cantilever can comprise a tip, and material can be transferred from the tip to a surface.

    摘要翻译: 改进的致动装置可用于直写纳米光刻和成像,包括使用枢轴点用于具有长行进路径的悬臂的向下偏转。 一种装置,包括至少一个保持器,至少一个悬臂,所述悬臂的延伸部,其中所述延伸部与致动器成一体,其中所述悬臂适于致动运动。 致动器可以是静电的,热的或压电的。 悬臂可以包括尖端,并且材料可以从尖端传递到表面。

    CANTILEVER WITH PIVOTING ACTUATION
    14.
    发明申请
    CANTILEVER WITH PIVOTING ACTUATION 失效
    带有起动执行器的CANTILEVER

    公开(公告)号:US20090178165A1

    公开(公告)日:2009-07-09

    申请号:US12323388

    申请日:2008-11-25

    IPC分类号: G12B21/08 B23P17/00 B44C1/22

    摘要: Improved actuation device useful in direct-write nanolithography and imaging including use of a pivot point for downward deflection of a cantilever with long travel path. A device comprising at least one holder, at least one cantilever, an extension of the said cantilever wherein the extension is integrated with an actuator, wherein the cantilever is adapted for actuated movement. The actuator can be electrostatic, thermal, or piezoelectric. The cantilever can comprise a tip, and material can be transferred from the tip to a surface.

    摘要翻译: 改进的致动装置可用于直写纳米光刻和成像,包括使用枢轴点用于具有长行进路径的悬臂的向下偏转。 一种装置,包括至少一个保持器,至少一个悬臂,所述悬臂的延伸部,其中所述延伸部与致动器成一体,其中所述悬臂适于致动运动。 致动器可以是静电的,热的或压电的。 悬臂可以包括尖端,并且材料可以从尖端传递到表面。