Probe chip, scan head, scanning probe microscopy device and use of a probe chip

    公开(公告)号:US12117467B2

    公开(公告)日:2024-10-15

    申请号:US17256914

    申请日:2019-07-05

    IPC分类号: G01Q70/02 G01Q70/10

    CPC分类号: G01Q70/02 G01Q70/10

    摘要: The present document relates to a probe chip for use in a scanning probe microscopy device for holding a probe mounted thereon. The probe chip includes a carrier element having a probe bearing side which is configured for bearing the probe to be extending therefrom as an integral or mounted part thereof. The carrier element further comprises a mounting side configured for mounting the probe chip onto a scan head of the scanning probe microscopy device, wherein the mounting side extends in a longitudinal and lateral direction of the carrier element to be substantially flat. The carrier element towards the probe bearing side thereof is truncated in the lateral direction on either side of a longitudinal axis through a center of the carrier element, such as to enable a rotation of the probe chip over a rotation angle around the longitudinal axis in use when the longitudinal axis is inclined at an inclination angle relative to a substrate surface to be scanned and when the probe is in a measurement position relative to the substrate surface.

    Probe cassette for holding a probe in storage for use in a scanning probe microscope

    公开(公告)号:US11709181B2

    公开(公告)日:2023-07-25

    申请号:US17770801

    申请日:2020-11-06

    IPC分类号: G01Q70/02

    CPC分类号: G01Q70/02

    摘要: The present disclosure concerns probe cassette 1 for holding a probe 60 in storage to provide automated transfer of the probe to a probe mount of a scanning probe microscope. The probe cassette comprising a first vacuum chamber C1 with a volume V1, and a second vacuum chamber C2 with a volume V2, and a first and second vacuum channel 10, respectively fluidly connecting the first and second vacuum chamber to an outlet 30 fluidly connectable to an external vacuum, such that upon application of the external vacuum a mounting position of the probe relative to the cassette and a mounting position of the cassette relative to the sample stage is maintained. The probe cassette arranged to allow breaking a vacuum condition in the second chamber maintaining the mounting position of the probe before breaking a vacuum condition in the first chamber maintaining a mounting position of the probe cassette.

    SCANNING HEAD OF SCANNING PROBE MICROSCOPE
    3.
    发明申请

    公开(公告)号:US20190056429A1

    公开(公告)日:2019-02-21

    申请号:US16102833

    申请日:2018-08-14

    IPC分类号: G01Q70/10 G01Q70/14 G01Q30/20

    摘要: A scanning head of a scanning probe microscope includes a scanning head frame having a first end portion and a second end portion which are oppositely disposed, the first end portion and the second end portion defining a first receiving space and a second receiving space, respectively; a sample table located in the first receiving space; a scanning module located in the second receiving space; and a plurality of fixed electrodes fixed on the second end portion of the scanning head frame. Signal lines of the scanning head of the present invention do not fall off or tear off during operation. In addition, the scanning head allows a laser to be incident on its scanning probe, enabling the scanning probe to be coupled with the laser, so that the range of application is wide.

    SCANNING PROBE MICROSCOPE
    4.
    发明申请

    公开(公告)号:US20180299480A1

    公开(公告)日:2018-10-18

    申请号:US15938185

    申请日:2018-03-28

    发明人: Masahiro OHTA

    IPC分类号: G01Q10/06 G01Q20/02 G01Q70/02

    摘要: A scanning probe microscope includes a position change unit that relatively changes positions of a fixed end of a cantilever and a surface of a sample S in a Z direction, a deflection amount measurement unit that measures a deflection amount of the cantilever, a Z direction movement distance detector that detects a movement distance in the Z direction while the fixed end is relatively moved with respect to the surface of the sample S from a predetermined initial position until a tip of a probe comes into contact with the surface of the sample S and the deflection amount becomes a predetermined value, and an initial position change unit that changes the initial position to a position further away from the surface of the sample S when the movement distance is below a predetermined lower limit.

    Miniaturized cantilever probe for scanning probe microscopy and fabrication thereof

    公开(公告)号:US09709597B2

    公开(公告)日:2017-07-18

    申请号:US14305588

    申请日:2014-06-16

    申请人: Bruker Nano, Inc.

    摘要: Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.

    Measurement of surface energy components and wettability of reservoir rock utilizing atomic force microscopy
    7.
    发明授权
    Measurement of surface energy components and wettability of reservoir rock utilizing atomic force microscopy 有权
    利用原子力显微镜测量储层岩石的表面能量成分和润湿性

    公开(公告)号:US09110094B2

    公开(公告)日:2015-08-18

    申请号:US14158359

    申请日:2014-01-17

    摘要: An instrument (and corresponding method) performs AFM techniques to characterize properties of a sample of reservoir rock. The AFM instrument is configured to have a probe with a tip realized from reservoir rock that corresponds to the reservoir rock of the sample. The AFM instrument is operated to derive and store data representing adhesion forces between the tip and the sample at one or more scan locations in the presence of a number of different fluids disposed between the tip and the sample. The AFM instrument is further configured to perform computational operations that process the data representing the adhesion forces for a given scan location in order to characterize at least one property of the rock sample at the given scan location. The properties can include total surface energy of the rock sample as well as wettability of the rock sample.

    摘要翻译: 仪器(和相应的方法)执行AFM技术来表征储层岩石样品的性质。 AFM仪器被配置为具有从储层岩石实现的具有对应于样品的储层岩石的尖端的探针。 操作AFM仪器以在存在位于尖端和样品之间的许多不同流体的情况下在一个或多个扫描位置导出和存储表示尖端和样品之间的粘附力的数据。 AFM仪器还被配置为执行计算操作,其处理表示给定扫描位置的粘附力的数据,以便表征给定扫描位置处的岩石样品的至少一个性质。 这些性质可以包括岩石样品的总表面能以及岩石样品的润湿性。

    MICROSCOPE OBJECTIVE MECHANICAL TESTING INSTRUMENT
    8.
    发明申请
    MICROSCOPE OBJECTIVE MECHANICAL TESTING INSTRUMENT 审中-公开
    显微镜目标机械测试仪器

    公开(公告)号:US20150075264A1

    公开(公告)日:2015-03-19

    申请号:US14388744

    申请日:2013-03-13

    申请人: Hysitron, Inc.

    摘要: An objective testing module includes a module base configured for coupling with an objective turret of a microscope. The objective testing module includes a mechanical testing assembly. The mechanical testing assembly is configured to mechanically test a sample at macro scale or less, and quantitatively determine one or more properties of the sample based on the mechanical testing. The mechanical testing assembly optionally includes a probe and one or more transducers coupled with the probe. The transducer measures one or more of force applied to a sample by the probe or displacement of the probe within the sample. In operation, an optical instrument locates a test location on a sample and the objective testing module mechanically tests at the test location with the mechanical testing assembly at a macro scale or less. The mechanical testing assembly further determines one or more properties of the sample according to the mechanical test.

    摘要翻译: 客观测试模块包括被配置为与显微镜的目标转台耦合的模块基座。 客观测试模块包括机械测试组件。 机械测试组件被配置为以大规模或更小的尺寸机械测试样品,并且基于机械测试定量地确定样品的一个或多个特性。 机械测试组件可选地包括探针和与探针耦合的一个或多个换能器。 传感器测量通过探头施加到样品的力或样品内探针位移的一种或多种。 在操作中,光学仪器将测试位置定位在样品上,并且客观测试模块在机械测试组件以大规模或更小的程度在测试位置进行机械测试。 机械测试组件根据机械测试进一步确定样品的一个或多个特性。

    High throughout reproducible cantilever functionalization
    9.
    发明授权
    High throughout reproducible cantilever functionalization 有权
    高度可重复的悬臂功能化

    公开(公告)号:US08898810B2

    公开(公告)日:2014-11-25

    申请号:US14138305

    申请日:2013-12-23

    申请人: UT-Battelle, LLC

    摘要: A method for functionalizing cantilevers is provided that includes providing a holder having a plurality of channels each having a width for accepting a cantilever probe and a plurality of probes. A plurality of cantilever probes are fastened to the plurality of channels of the holder by the spring clips. The wells of a well plate are filled with a functionalization solution, wherein adjacent wells in the well plate are separated by a dimension that is substantially equal to a dimension separating adjacent channels of the plurality of channels. Each cantilever probe that is fastened within the plurality of channels of the holder is applied to the functionalization solution that is contained in the wells of the well plate.

    摘要翻译: 提供了一种用于功能化悬臂的方法,其包括提供具有多个通道的保持器,每个通道具有用于接收悬臂探头和多个探针的宽度。 多个悬臂探针通过弹簧夹固定在保持器的多个通道上。 孔板的孔填充有官能化溶液,其中孔板中的相邻孔被分开大致等于分离多个通道的相邻通道的尺寸的尺寸。 固定在保持器的多个通道内的每个悬臂探头被施加到容纳在孔板的孔中的官能化溶液。

    SCANNING PROBE MICROSCOPY CANTILEVER COMPRISING AN ELECTROMAGNETIC SENSOR
    10.
    发明申请
    SCANNING PROBE MICROSCOPY CANTILEVER COMPRISING AN ELECTROMAGNETIC SENSOR 有权
    扫描探头包含电磁传感器的显微镜

    公开(公告)号:US20140047585A1

    公开(公告)日:2014-02-13

    申请号:US13570666

    申请日:2012-08-09

    IPC分类号: G01Q70/08

    摘要: An apparatus and method directed to a scanning probe microscopy cantilever. The apparatus includes body and an electromagnetic sensor having a detectable electromagnetic property varying upon deformation of the body. The method includes scanning the surface of a material with the cantilever, such that the body of the cantilever undergoes deformations and detecting the electromagnetic property varying upon deformation of the body of the cantilever.

    摘要翻译: 一种针对扫描探针显微镜悬臂的装置和方法。 该装置包括主体和电磁传感器,该电磁传感器具有在身体变形时变化的可检测的电磁特性。 该方法包括用悬臂扫描材料的​​表面,使得悬臂的主体经历变形并检测在悬臂体的变形时变化的电磁特性。