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    Heating element
    11.
    发明申请
    Heating element 失效
    加热元件

    公开(公告)号：US20070241096A1

    公开(公告)日：2007-10-18

    申请号：US11783581

    申请日：2007-04-10

    申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

    发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

    IPC分类号： F27D11/00

    CPC分类号： H01L21/67103 ,  H05B3/143

    摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

    摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 具有形成在耐热基体上的加热器图案3a的导电层3; 在导电层上形成具有绝缘性的保护层4; 以及作为形成在保护层上的具有化学计量比的氧量的氧化物的耐腐蚀层4p。 可以提供一种加热元件，其中在保护层上形成电阻率或硬度被控制的耐腐蚀层，即使在高温环境和腐蚀性气体的环境下腐蚀性气体难以透过， 由此，能够避免由于导电层，特别是电源端子部分的腐蚀而导致的劣化，另外即使具有卡盘图案也能够实现作为静电卡盘的高功能，并且具有长的使用寿命，并且是 能够以低成本生产。

    ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF
    12.
    发明申请
    ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF 有权
    静电切割及其制造方法

    公开(公告)号：US20070253138A1

    公开(公告)日：2007-11-01

    申请号：US11685793

    申请日：2007-03-14

    申请人： Hideki Fujii ,  Waichi Yamamura

    发明人： Hideki Fujii ,  Waichi Yamamura

    IPC分类号： H01L21/683

    CPC分类号： H01L21/6833

    摘要： The invention provides an electrostatic chuck in which a workpiece-chucking surface is made flat. An electrostatic chuck with a built-in electric heating means comprises a base plate formed of carbon or a carbon-based composite material and, successively formed on one surface of the base plate, an insulating layer (a1), an electroconductive layer (a2) to serve as a chucking electrode and an dielectric layer (a3) to form a workpiece-chucking surface and, successively formed on the other surface of the base plate, an insulating layer (b1) and an electroconductive layer (b2) to serve as an electric heater element, the electrostatic chuck improved in that the workpiece-chucking surface of the electrostatic chuck and an opposite surface thereof are warped to have a relationship selected from concavo-convex and convexo-concave, and in that the warping of the surfaces is in a manner such that the workpiece-chucking surface of the dielectric layer is rendered flat when the opposite surface of the electrostatic chuck is fastened to a machine.

    摘要翻译： 本发明提供了一种静电卡盘，其中工件夹紧表面被制成平坦的。 具有内置电加热装置的静电卡盘包括由碳或碳基复合材料形成的基板，并且在基板的一个表面上依次形成绝缘层（1），导电层（a） 2）用作夹持电极和介电层（a 3）以形成工件夹持表面，并且在基板的另一个表面上依次形成绝缘层（b 1）和导电层（b 2） ）用作电加热器元件时，静电卡盘的改进在于静电卡盘的工件夹紧表面和相对表面翘曲成具有从凹凸和凸凹选择的关系，并且由于翘曲 的表面的方式使得当静电卡盘的相对表面紧固到机器时，电介质层的工件夹紧表面变平坦。

    Elongating method of optical fiber base material
    14.
    发明授权
    Elongating method of optical fiber base material 有权
    光纤基材伸长方法

    公开(公告)号：US07458234B2

    公开(公告)日：2008-12-02

    申请号：US10593274

    申请日：2005-03-07

    申请人： Waichi Yamamura

    发明人： Waichi Yamamura

    IPC分类号： C03B37/02 ,  C03B37/025

    CPC分类号： C03B37/01486 ,  C03B37/01466

    摘要： There is provided an elongating method of an optical fiber base material which can easily correct a distorted portion of an optical fiber base material with it being possible to elongate the optical fiber base material to reduce its diameter. According to such an elongating method, in an elongating process of elongating an optical fiber base material by heating the optical fiber base material in a heating furnace so that a diameter of the optical fiber base material is reduced, before the optical fiber base material is elongated from an end thereof, a distorted portion of the optical fiber base material is connected by being heated to be softened in the heating furnace. To do so, the optical fiber base material is attached to a hanging mechanism so as to be hung in an electric furnace, the distorted portion of the optical fiber base material is heated to be softened. The elongation is stated after a difference between the elongation axis and an end of one of the optical fiber base material and the dummy rod attached to the optical fiber base material is reduced to be 10 mm or less. Here, the difference may be detected by using a noncontact position detecting apparatus, which may be one of a laser measuring device and an image processing apparatus.

    摘要翻译： 提供了一种光纤基材的伸长方法，其可以容易地校正光纤基材的变形部分，可以延长光纤基材以减小其直径。 根据这样的延长方法，在通过在加热炉中加热光纤基材而使光纤基材延长使得光纤基材的直径减小的拉伸工序中，在光纤基材伸长之前 从其端部，通过在加热炉中加热而使光纤基材的变形部分连接而软化。 为了这样做，将光纤基材附着到悬挂机构上以悬挂在电炉中，将光纤基材的变形部分加热软化。 伸长率在将光纤基材和附着于光纤基材的虚拟棒的伸长轴与端部之间的差减小到10mm以上之后进行说明。 这里，可以通过使用可以是激光测量装置和图像处理装置之一的非接触位置检测装置来检测该差异。

    Method of stretching optical fiber base material and stretching apparatus
    15.
    发明申请
    Method of stretching optical fiber base material and stretching apparatus 审中-公开
    拉伸光纤基材和拉伸装置的方法

    公开(公告)号：US20070104444A1

    公开(公告)日：2007-05-10

    申请号：US10582016

    申请日：2004-12-02

    申请人： Shinji Suzuki ,  Waichi Yamamura

    发明人： Shinji Suzuki ,  Waichi Yamamura

    IPC分类号： G02B6/00

    CPC分类号： C03B37/01242 ,  Y02P40/57

    摘要： A stretching method and apparatus of an optical fiber base material including gripping both ends in a longitudinal direction of an optical fiber base material by a pair of gripping devices, and, while pulling the optical fiber base material by moving one or both of the pair of the gripping devices in a first direction parallel to the longitudinal direction, moving a heating device relative to the optical fiber base material in a second direction opposite to the first direction, wherein stretch of the optical fiber base material is performed while changing the relative moving speed Vb(x) in accordance with expression (1): Vb·[Dmax/D(x)]2≦Vb(x)≦Vb·[Dmax/D(x)]3  (1) where Vb represents a reference speed, Dmax represents a maximum outer diameter of the optical fiber base material, D(x) represents an outer diameter at a heated position x of the optical fiber base material, and Vb(x) represents a relative moving speed of the heating device relative to the optical fiber base material at the heated position x.

    摘要翻译： 一种光纤基材的拉伸方法和装置，包括通过一对夹持装置在光纤基材的长度方向上夹持两端，并且通过移动所述一对夹持装置中的一个或两者来拉动光纤基材 所述夹持装置在与所述长度方向平行的第一方向上，在与所述第一方向相反的第二方向上相对于所述光纤基材移动加热装置，在进行相对移动速度的同时进行所述光纤基材的拉伸 Vb（x）根据表达式（1）：<？in-line-formula description =“In-line formula”end =“lead”？> Vb。[D最大值/ D（x ）] 2 <= VB（x）<= VB。[D最大/ D（x）] 3（1） -line-formula description =“In-line Formulas”end =“tail”？>其中Vb表示参考速度，D 表示光纤基材的最大外径，D（x ）表示外径 在光纤基材的加热位置x处，Vb（x）表示加热装置相对于加热位置x处的光纤基材的相对移动速度。

    Method of elongating optical fiber base material, and apparatus for elongating the same
    18.
    发明授权
    Method of elongating optical fiber base material, and apparatus for elongating the same 有权
    拉伸光纤基材的方法及其伸长装置

    公开(公告)号：US07854157B2

    公开(公告)日：2010-12-21

    申请号：US10585986

    申请日：2005-01-12

    申请人： Soichiro Kemmochi ,  Waichi Yamamura ,  Takaaki Nacao ,  Mitsukuni Sakashita

    发明人： Soichiro Kemmochi ,  Waichi Yamamura ,  Takaaki Nacao ,  Mitsukuni Sakashita

    IPC分类号： B21C9/00

    CPC分类号： C03B37/0126 ,  Y02P40/57

    摘要： The method, in which base material ingot 1 is heated and softened in an electric furnace 3, drawn with a pair of pinch roller 6 and 6, and elongated to make base material rod 7 having a smaller diameter than the ingot, features: forming either a roller groove 11 having a curvature radius which is larger than the outer diameter of the base material rod 7 or a V-shaped roller groove 11 having the cross section consisting of straight lines on the surface of the pinch roller 6 made of metal; nipping with the facing roller grooves 11 and 11 respectively formed on the surfaces of a pair of said pinch rollers 6 and 6; and drawing said base material rod.

    摘要翻译： 在电炉3中加热和软化基材锭1的方法，用一对压紧辊6和6拉伸并拉长以制造具有比锭更小的直径的基材棒7，其特征在于： 具有比基材棒7的外径大的曲率半径的滚子槽11或由金属制成的压紧辊6的表面上具有由直线构成的横截面的V形滚子槽11; 夹在分别形成在一对所述夹送辊6和6的表面上的面对辊槽11和11; 并拉出所述基材棒。

    Elongating method of optical fiber base material
    19.
    发明申请
    Elongating method of optical fiber base material 有权
    光纤基材伸长方法

    公开(公告)号：US20070137258A1

    公开(公告)日：2007-06-21

    申请号：US10593274

    申请日：2005-03-07

    申请人： Waichi Yamamura

    发明人： Waichi Yamamura

    IPC分类号： C03B37/02

    CPC分类号： C03B37/01486 ,  C03B37/01466

    摘要： There is provided an elongating method of an optical fiber base material which can easily correct a distorted portion of an optical fiber base material with it being possible to elongate the optical fiber base material to reduce its diameter. According to such an elongating method, in an elongating process of elongating an optical fiber base material by heating the optical fiber base material in a heating furnace so that a diameter of the optical fiber base material is reduced, before the optical fiber base material is elongated from an end thereof, a distorted portion of the optical fiber base material is connected by being heated to be softened in the heating furnace. To do so, the optical fiber base material is attached to a hanging mechanism so as to be hung in an electric furnace, the distorted portion of the optical fiber base material is heated to be softened. The elongation is stated after a difference between the elongation axis and an end of one of the optical fiber base material and the dummy rod attached to the optical fiber base material is reduced to be 10 mm or less. Here, the difference may be detected by using a noncontact position detecting apparatus, which may be one of a laser measuring device and an image processing apparatus.

    摘要翻译： 提供了一种光纤基材的伸长方法，其可以容易地校正光纤基材的变形部分，可以延长光纤基材以减小其直径。 根据这样的伸长方法，在通过在加热炉中加热光纤基材使得光纤基材的直径减小的方法来拉伸光纤基材，在光纤基材伸长之前 从其端部，通过在加热炉中加热而使光纤基材的变形部分连接而软化。 为了这样做，将光纤基材附着到悬挂机构上以悬挂在电炉中，将光纤基材的变形部分加热软化。 伸长率在将光纤基材和附着于光纤基材的虚拟棒的伸长轴与端部之间的差减小到10mm以上之后进行说明。 这里，可以通过使用可以是激光测量装置和图像处理装置之一的非接触位置检测装置来检测该差异。