MIM CAPACITOR AND METHOD OF FORMING THE SAME
    12.
    发明申请

    公开(公告)号:US20190123133A1

    公开(公告)日:2019-04-25

    申请号:US16225896

    申请日:2018-12-19

    Abstract: A capacitive device includes: a first metal plate; a first planar dielectric layer disposed on the first metal plate; a second planar dielectric layer disposed on the first planar dielectric layer; a third planar dielectric layer disposed on the second planar dielectric layer; and a second metal plate disposed on the third planar dielectric layer; wherein the first planar dielectric layer has a first dielectric constant, the second planar dielectric layer has a second dielectric constant, and the third planar dielectric layer has a third dielectric constant, and the second dielectric constant is different from the first dielectric constant and the third dielectric constant, the second planar dielectric layer includes Tantalum pentoxide.

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