Abstract:
Disclosed herein is a fastening structure which enables objects to be easily coupled to or removed from each other, and which enables the relative positions between the objects to be changed in the longitudinal position of zipper rails. The fastening structure includes a first zipper rail unit which is provided on a planar portion of a first object and has zipper rails arranged parallel to each other, and a second zipper rail unit which is provided on a planar portion of a second object and has zipper rails arranged parallel to each other. While the zipper rails of the first zipper rail unit are individually coupled to the corresponding zipper rails of the second zipper rail unit in a female-male engagement manner, relative positions between the first object and the second object can be changed in the longitudinal direction of the zipper rails.
Abstract:
The present invention relates to a MEMS package, more specifically to an optical module package. According to an aspect of the present invention, the optical modulator module package includes an optical modulator, emitting a beam of light, which is modulated by diffracting and interfering the beam of light by an upwardly and downwardly spaced distance of a mirror, the beam of light being incident from a light source; a driver IC, mounted on the surrounding of the optical modulator to drive the optical modulator; and a noise removing member, intercepting a beam of light, which is not incident to a mirror area of the light modulator, of the incident beams of light.
Abstract:
The present invention relates to a composition for preventing or treating osteoporosis which comprises an ibandronic acid, or a pharmaceutically acceptable salt thereof, or a hydrate thereof, and vitamin D. The present invention relates to a composition for preventing or treating osteoporosis which has uniform medicinal effects by minimizing the differences in physical properties between ibandronic acid, or the pharmaceutically acceptable salt thereof, or the hydrate thereof, and vitamin D.
Abstract:
An electrostatic chuck to minimize an arc and a glow discharge during processing of a semiconductor substrate is provided, In one aspect, an electrostatic chuckin a processing chamber includes a body having a first hole for providing a cooling gas to a backside of a substrate to control a temperature of the substrate, an inner electrode for generating an electrostatic force and a dielectric layer. A ceramic block is tightly inserted into a first hole and has a second hole connected to the first hole. A third hole formed through the dielectric layer is connected to the first hole and the second hole. The cooling gas is provided to the backside of the substrate through the first hole or the second hole. Since the first hole is covered with the ceramic block, the generation of an arc or a glow discharge inside the first hole may be minimized, thereby preventing damage to the electrostatic chuck and improving production yields.
Abstract:
An apparatus for heating a substrate of a semiconductor device includes a hot plate, on which a semiconductor substrate is placed, and a heater for heating the hot plate. The hot plate is preferably a composite plate including a plurality of plates having different thermal conductivities from each other. For example, a first plate adjacent to the heater can be made of aluminum, which has a relatively high thermal conductivity. A second plate, laminated on top of the first plate, can be made of titanium or stainless steel, which both have a thermal conductivity lower than aluminum. A composite hot plate as disclosed herein is better able to maintain a constant temperature and a uniform temperature distribution in order to more uniformly heat a substrate and to reduce an amount of energy required for the heating process. In addition, the reliability and productivity of the semiconductor device manufactured by the apparatus can be improved.
Abstract:
An alkaline cell having an anode comprising zinc and a cathode comprising manganese dioxide wherein the cathode is located annularly along the inside surface of the cell housing and has a plurality of indentations on the inside of its surface facing the cell interior. Each indentation has a wall defining a channel with an opening thereto running preferably in the direction of the cell's length. The channel and opening facing the cell interior filled with anode material. The cell can have an anode current collector, typically of metal, with at least a portion of its surface extending into the cathode indentation channel. The anode current collector can have a portion of its surface extending from a point within the anode and into the cathode indentation channel through said opening. The cell can include a cathode current collector comprising a sheet of conductive material such as a sheet of metal or graphite placed within the cathode, particularly within thick regions of the cathode. The cathode current collector can be used in conjuction with a conventional single nail anode current collector or in combination with the extended surface anode current collectors of the invention. Such alkaline cells exhibit improved performance, particularly under high power application.