公开(公告)号：US20060115920A1

公开(公告)日：2006-06-01

申请号：US11330951

申请日：2006-01-11

申请人： Masami Urano ,  Hiromu Ishii ,  Toshishige Shimamura ,  Yasuyuki Tanabe ,  Katsuyuki Machida ,  Tomomi Sakata

发明人： Masami Urano ,  Hiromu Ishii ,  Toshishige Shimamura ,  Yasuyuki Tanabe ,  Katsuyuki Machida ,  Tomomi Sakata

IPC分类号： H01L21/00 ,  G01B7/16

CPC分类号： B81C1/00246 ,  B81C2203/0735

摘要： In a semiconductor device having a MEMS according to this invention, a plurality of units having movable portions for constituting a MEMS are monolithically mounted on a semiconductor substrate on which an integrated circuit including a driving circuit, sensor circuit, memory, and processor is formed. Each unit has a processor, memory, driving circuit, and sensor circuit.

摘要翻译： 在具有根据本发明的MEMS的半导体器件中，具有用于构成MEMS的可移动部分的多个单元被单片地安装在其上形成有包括驱动电路，传感器电路，存储器和处理器的集成电路的半导体衬底上。 每个单元都有一个处理器，存储器，驱动电路和传感器电路。

公开(公告)号：US06445845B1

公开(公告)日：2002-09-03

申请号：US09558152

申请日：2000-04-26

申请人： Tomomi Sakata ,  Hiroyoshi Togo ,  Fusao Shimokawa ,  Mitsuhiro Makihara

发明人： Tomomi Sakata ,  Hiroyoshi Togo ,  Fusao Shimokawa ,  Mitsuhiro Makihara

IPC分类号： G02B626

CPC分类号： G02B6/35 ,  G02B6/3538 ,  G02B6/3546 ,  G02B6/3592 ,  G02B6/3596 ,  G02B26/004

摘要： An optical switch for switching a light path between two optical waveguides is provided. The switch has a slit formed diagonally cutting across the crossing point of crossing optical waveguides and a substance in the slit has a function of transmitting or reflecting an optical signal is selectively held in the slit. The slit is narrower than cores of the optical waveguides, and has a center line formed on a bisection of an interior angle between optical axes of the crossing optical waveguides. Thus, the substance in the slit serves to make optical intensity reflected to each of the optical waveguides uniform. Further, a crossing optical waveguide consists of a reflecting structure having its interior filled with air during reflection and the intersecting angle between the first group of optical waveguides is between 0 to 90 degrees and preferably substantially between 73 and 74 degrees.

摘要翻译： 提供了用于切换两个光波导之间的光路的光开关。 开关具有沿交叉光波导的交叉点对角地切割的狭缝，狭缝中的物质具有选择性地保持在狭缝中的发送或反射光信号的功能。 狭缝比光波导的芯窄，并且具有在交叉光波导的光轴之间的内角的二等分线上形成的中心线。 因此，狭缝中的物质用于使每个光波导反射的光强度均匀。 此外，交叉光波导由反射结构组成，其反射结构在反射期间具有填充有空气的内部，并且第一组光波导之间的相交角在0至90度之间，优选地基本上在73和74度之间。